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Oxide-based method of making compound semiconductor films and making related electronic devices 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/00
출원번호 US-0109814 (1998-07-02)
발명자 / 주소
  • Kapur Vijay K.
  • Basol Bulent M.
  • Leidholm Craig R.
  • Roe Robert A.
출원인 / 주소
  • International Solar Electronic Technology, Inc.
대리인 / 주소
    Fulwider Patton Lee & Utecht, LLP
인용정보 피인용 횟수 : 137  인용 특허 : 7

초록

A method for forming a compound film includes the steps of preparing a source material, depositing the source material on a base and forming a preparatory film from the source material, heating the preparatory film in a suitable atmosphere to form a precursor film, and providing suitable material to

대표청구항

[ What is claimed is:] [1.] A method for forming a compound film, comprising the steps of:(a) preparing a source material including oxide-containing particles including Group IB and IIIA elements;(b) depositing said source material on a base and forming a preparatory film from said source material;(

이 특허에 인용된 특허 (7)

  1. Basol Bulent M. (Redondo Beach CA) Kapur Vijay K. (Northridge CA), Group I-III-VI2 semiconductor films for solar cell application.
  2. Ermer James H. (Los Angeles CA) Love Robert B. (Chatsworth CA), Method for forming Cu In Se2 films.
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  5. Negami Takayuki,JPX ; Terauchi Masaharu,JPX ; Nishitani Mikihiko,JPX ; Wada Takahiro,JPX, Precursor for semiconductor thin films and method for producing semiconductor thin films.
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  7. Kapur Vijay K. (Northridge CA) Choudary Uppala V. (Chatsworth CA) Chu Alan K. P. (Granada Hills CA), Process of forming a compound semiconductive material.

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