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Thin film semiconductor and method for manufacturing the same, semiconductor device and method for manufacturing the same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/00
출원번호 US-0065654 (1998-04-23)
우선권정보 JP0061894 (1996-02-23)
발명자 / 주소
  • Yamazaki Shunpei,JPX
  • Miyanaga Akiharu,JPX
  • Koyama Jun,JPX
  • Fukunaga Takeshi,JPX
출원인 / 주소
  • Semiconductor Energy Laboratory Co., Ltd., JPX
대리인 / 주소
    Fish & Richardson P.C.
인용정보 피인용 횟수 : 93  인용 특허 : 5

초록

The present invention is related to a thin film semiconductor which can be regarded as substantially a single crystal and a semiconductor device comprising an active layer formed by the thin film semiconductor. At least a concave or convex pattern is formed intentionally on a insulating film provide

대표청구항

[ What is claimed:] [1.] A method for manufacturing a semiconductor device including an active layer comprising a semiconductor film, said method comprising:forming a silicon oxide film on an insulating surface;forming at least a concave or convex pattern by patterning said silicon oxide film into a

이 특허에 인용된 특허 (5)

  1. Sekimura Nobuyuki (Kawasaki JPX) Kamio Masaru (Atsugi JPX) Takao Hideaki (Sagamihara JPX) Motoi Taiko (Sagamihara JPX) Murata Tatsuo (Atsugi JPX), Ferroelectric liquid crystal device having color filters on row or column electrodes.
  2. Ohmae Hideki (Suita JPX), Liquid crystal display panel having a phase grating formed of liquid crystal molecules.
  3. Yamazaki Shunpei,JPX ; Teramoto Satoshi,JPX, Semiconductor circuit for electro-optical device and method of manufacturing the same.
  4. Yamazaki Shunpei,JPX ; Miyanaga Akiharu,JPX ; Koyama Jun,JPX ; Fukunaga Takeshi,JPX, Thin film semiconductor and method for manufacturing the same, semiconductor device and method for manufacturing the sa.
  5. Yamazaki Shunpei,JPX ; Teramoto Satoshi,JPX, Thin film type monolithic semiconductor device.

이 특허를 인용한 특허 (93)

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  8. Bae Sung-Sik,KRX, Liquid crystal panel having a thin film transistor for driver circuit and a method for fabricating thereof.
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  11. Maekawa,Shinji; Akimoto,Kengo, Method for fabricating thin film transistor.
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