[특허]Substrate transferring mechanism

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	C23C-016/00 B65G-049/07
출원번호	US-0453031 (1999-12-02)
우선권정보	JP0219769 (1995-08-05)
발명자 / 주소	Yonemitsu Shuji,JPX Karino Toshikazu,JPX Yoshida Hisashi,JPX Watahiki Shinichiro,JPX Yoshida Yuji,JPX Shimura Hideo,JPX Sugimoto Takeshi,JPX Aburatani Yukinori,JPX Ikeda Kazuhito,JPX
출원인 / 주소	Kokusai Electric Co., Ltd., JPX
인용정보	피인용 횟수 : 46 인용 특허 : 28

초록 ▼

A substrate processing apparatus comprises a substrate transfer chamber; a substrate processing chamber disposed on a first side wall of the substrate transfer chamber; an intermediate substrate holding chamber disposed on a second side wall of the substrate transfer chamber; a first substrate holde

A substrate processing apparatus comprises a substrate transfer chamber; a substrate processing chamber disposed on a first side wall of the substrate transfer chamber; an intermediate substrate holding chamber disposed on a second side wall of the substrate transfer chamber; a first substrate holder disposed within the intermediate substrate holding chamber; a second substrate holder disposed within the substrate processing chamber; a first substrate transfer robot, disposed within the substrate transfer chamber, for transferring the substrate between the substrate processing chamber and the intermediate substrate holding chamber; a first gate valve disposed between the substrate processing chamber and the substrate transfer chamber; a second gate valve disposed between the substrate transfer chamber and the intermediate substrate holding chamber; an atmospheric pressure section located opposite to the substrate transfer chamber with respect to the intermediate substrate holding chamber; a third valve disposed between the intermediate substrate holding chamber and the atmospheric pressure section; a cassette holder disposed within the atmospheric pressure section; and a second substrate transfer robot disposed within the atmospheric pressure section, for transferring the substrate between a cassette held in the cassette holder and the intermediate substrate holding chamber.

대표청구항 ▼

[ What is claimed is:] [1.] A substrate transferring mechanism, comprising:a cassette holding device for holding a cassette in which substrates are to be stacked;a substrate holding device for holding said substrate or said substrates;a substrate transfer device for transferring said substrate from

[ What is claimed is:] [1.] A substrate transferring mechanism, comprising:a cassette holding device for holding a cassette in which substrates are to be stacked;a substrate holding device for holding said substrate or said substrates;a substrate transfer device for transferring said substrate from said cassette held by said cassette holding device to said substrate holding device and/or transferring said substrate from said substrate holding device to said cassette held by said cassette holding device;a cassette transferring device for transferring the cassette to and from said cassette holding device;wherein said substrate transfer device and said cassette transfer device are mounted on a single elevator.

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이 특허에 인용된 특허 (28) 인용/피인용 타임라인 분석

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