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Method of casting patterned dielectric structures 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B29C-039/02
  • H01J-009/00
출원번호 US-0028040 (1998-02-23)
발명자 / 주소
  • Poco John F.
  • Hrubesh Lawrence W.
출원인 / 주소
  • The Regents of the University of California
대리인 / 주소
    Thompson
인용정보 피인용 횟수 : 21  인용 특허 : 29

초록

A pattern of dielectric structures are formed directly on a substrate in a single step using sol-gel chemistry and molding procedures. The resulting dielectric structures are useful in vacuum applications for electronic devices. Porous, lightweight structures having a high aspect ratio that are suit

대표청구항

[ The invention claimed is:] [1.] A method for making a pattern of dielectric structures on a substrate, comprising:providing a mold having a pattern of cavities formed therein;filling the cavities in the mold with a precursor solution and removing any trapped air in the cavities;covering the filled

이 특허에 인용된 특허 (29)

  1. Haven Duane A. (Cupertino CA), Backplate of field emission device with self aligned focus structure and spacer wall locators.
  2. Huang Jammy C. (Taipei TWX) Liu David N. (Hsinchu TWX), Fabrication of high aspect ratio spacers for field emission display.
  3. Jones Gary W. (Poughkeepsie NY) Zimmerman Steven M. (Pleasant Valley NY), Field emission display devices, and field emisssion electron beam source and isolation structure components therefor.
  4. Jones Gary W. (Raleigh NC) Zimmerman Steven M. (Pleasant Valley NY), Flat panel display assembly comprising photoformed spacer structure, and method of making the same.
  5. Ushifusa Nobuyuki,JPX ; Tsuchida Seiichi,JPX ; Takai Teruo,JPX ; Hashimoto Ken,JPX ; Ohtaka Hiroshi,JPX ; Ohsawa Michitaka,JPX ; Matsuzaki Eiji,JPX ; Ishigaki Masaji,JPX ; Yatsuda Norio,JPX ; Sasaki , Gas discharge display panel having communicable main and auxiliary discharge spaces and manufacturing method therefor.
  6. Whalen Philip J. ; Jamalabad Vikram R. ; Pollinger John P. ; Agarwala Mukesh ; Danforth Stephen C., Gel cast molding with fugitive molds.
  7. Cathey ; Jr. David A. (Boise ID) Browing Jim J. (Boise ID), Interelectrode spacers for display devices including field emission displays.
  8. Fahlen Theodore S. (San Jose CA) Duboc ; Jr. Robert M. (Menlo Park CA) Lovoi Paul A. (Saratoga CA), Internal support structure for flat panel device.
  9. Nogami Tatsuya (Funabashi JPX) Sakai Rie (Funabashi JPX) Hosoya Takeshi (Funabashi JPX), Liquid coating composition forming a liquid crystal display element insulating film.
  10. Yamane Masayuki (Kawasaki JPX), Method and composition for the manufacture of gradient index glass.
  11. Fox ; III Angus C. (Boise ID), Method for fabricating spacer support structures useful in flat panel displays.
  12. Cathey ; Jr. David A. (Boise ID) Browing Jim J. (Boise ID), Method for forming spacers for display devices employing reduced pressures.
  13. Jansen Rolf-Michael,DEX ; Kessler Birgit,DEX ; Wonner Johann,DEX ; Zimmermann Andreas,DEX, Method for the subcritical drying of aerogels.
  14. Fahlen Theodore S. (San Jose CA) Duboc ; Jr. Robert M. (Menlo Park CA) Lovoi Paul A. (Saratoga CA), Method of fabricating flat panel device having internal support structure.
  15. Bernhardt Anthony F. (Berkeley CA) Contolini Robert J. (Pleasanton CA), Method of forming a spacer for field emission flat panel displays.
  16. Li Hong (Cambridge MA), Method of manufacturing a precision micro-filter.
  17. Lowrey Tyler A. (Boise ID) Doan Trung T. (Boise ID) Cathey David A. (Boise ID) Rolfson J. Brett (Boise ID), Method to form high aspect ratio supports (spacers) for field emission display using micro-saw technology.
  18. Spindt Christopher J. ; Morris David L. ; Fahlen Theodore S. ; Schmid Anthony P. ; Lovoi Paul A., Methods for fabricating a flat panel display having high voltage supports.
  19. Frisch Eldon E. (Midland MI), Methods for forming hollow, porous-surfaced elastomeric bodies.
  20. Farnworth Warren M. (Boise ID), Micro-pillar fabrication utilizing a stereolithographic printing process.
  21. Watkins John B. (Independence MO), Replication of information carriers.
  22. Marella Marcello,ITX ; Meregalli Letizia,ITX ; Tomaselli Michele,ITX, Sol-gel process for obtaining pure and mixed oxide zirconia spheres, microspheres and washcoats, useful as catalysts or.
  23. Taylor Robert H. (Huntsville AL) Levine Jules D. (Dallas TX), Spacer for flat panel display.
  24. Schmid Anthony P. (Solana Beach CA) Spindt Christopher J. (Menlo Park CA) Morris David L. (San Jose CA) Fahlen Theodore S. (San Jose CA) Sun Yu Nan (Sunnyvale CA), Spacer structures for use in flat panel displays and methods for forming same.
  25. Cathey David A. (Boise IA) Yu Chris C. (Boise IA) Doan Trung T. (Boise IA) Lowrey Tyler A. (Boise IA) Rolfson J. Brett (Boise IA), Spacers for field emission display fabricated via self-aligned high energy ablation.
  26. Garcia Michel (Les Milles FRX) Pepi Richard (Beziers FRX), Spacers for flat display screens.
  27. Lowe Anthony (Braishfield GBX), Spacers for flat panel displays.
  28. Cathey David A. (Boise ID) Hofmann James J. (Boise ID) Dynka Danny (Boise ID) Stansbury Darryl M. (Boise ID), Spacers for large area displays.
  29. Prochazka Svante (Ballston Lake NY), Synthesis of mixed oxide composition.

이 특허를 인용한 특허 (21)

  1. Carlson, Robert Jon, Aerogel-based mold for MEMS fabrication and formation thereof.
  2. Carlson, Robert J., Aerogel-bases mold for MEMS fabrication and formation thereof.
  3. Stoner, Brian; Piascik, Jeffrey, Bipolar microelectronic device.
  4. Weidman, Timothy; Nault, Michael P; Chang, Josephine J, Capping layer for extreme low dielectric constant films.
  5. Barton, Roger W.; Nystrom, Michael J.; Mackey, Bob L.; Pan, Lawrence S.; Pei, Shiyou; Wallace, Stephen; Smith, Douglas M., Constitution and fabrication of flat-panel display and porous-faced structure suitable for partial of full use in spacer of flat-panel display.
  6. Barton,Roger W.; Narayanan,Kollengode S.; Mackey,Bob L.; Macaulay,John M.; Hopple,George B.; Schropp, Jr.,Donald R.; Nystrom,Michael J.; Gopalakrishnan,Sudhakar; Pei,Shiyou; Xu,Xueping, Fabrication of flat-panel display having spacer with rough face for inhibiting secondary electron escape.
  7. Mandal, Robert P.; Demos, Alexandros T.; Weidman, Timothy; Nault, Michael P.; Bekiaris, Nikolaos; Weigel, Scott J.; Senecal, Lee A.; MacDougal, James E.; Thridandam, Hareesh, Ionic additives for extreme low dielectric constant chemical formulations.
  8. Mandal, Robert P; Demos, Alexandros T; Weidman, Timothy; Nault, Michael P; Bekiaris, Nikolaos; Weigel, Scott J; Senecal, Lee A.; MacDougall, James E.; Thridandam, Hareesh, Ionic additives for extreme low dielectric constant chemical formulations.
  9. Mandal,Robert P.; Demos,Alexandros T.; Weidman,Timothy; Nault,Michael P.; Bekiaris,Nikolaos; Weigel,Scott Jeffrey; Senecal,Lee A.; Mac Dougall,James E.; Thridandam,Hareesh, Ionic additives for extreme low dielectric constant chemical formulations.
  10. Takenaka, Shigeo; Fukuda, Kumio; Nikaido, Masaru; Ishikwa, Satoshi, Laminated mold for spacer assembly of a flat panel display.
  11. Hofmann, James J.; Vaartstra, Brian A.; Kraus, Brenda D.; Westmoreland, Donald L., Method for making sol gel spacers for flat panel displays.
  12. Brown, Scott C.; Cain, Andrew W.; Thompson, Randell L., Method for the manufacturing of a composite.
  13. Park,Joon Shik; Park,Soon Sup; Jung,Suk Won; Cho,Jin Woo, Method of fabricating a micro device.
  14. Kloster,Grant M.; Staintes,David; Ramanathan,Shriram, Method of forming a stacked device filler.
  15. Vaarstra, Brian A., Method of forming flow-fill structures.
  16. Lee,Kang P.; Gould,George L.; Gronemeyer,William; Stepanian,Christopher John, Methods to produce gel sheets.
  17. Lee,Kang P.; Gould,George L.; Gronemeyer,William; Stepanian,Christopher John, Methods to produce gel sheets.
  18. Takenaka, Shigeo; Fukuda, Kumio; Nikaido, Masaru; Ishikawa, Satoshi, SPACER ASSEMBLY FOR FLAT PANEL DISPLAY APPARATUS, METHOD OF MANUFACTURING SPACER ASSEMBLY, METHOD OF MANUFACTURING FLAT PANEL DISPLAY APPARATUS, FLAT PANEL DISPLAY APPARATUS, AND MOLD USED IN MANUFAC.
  19. Detry, James F., Sacrificial layers made from aerogel for microelectromechanical systems (MEMS) device fabrication processes.
  20. Kloster,Grant M.; Goodner,Michael D.; Ramanathan,Shriram; Morrow,Patrick, Stacked device underfill and a method of fabrication.
  21. Weidman, Timothy; Lu, Yunfeng; Nault, Michael P; Barnes, Michael; Moghadam, Farhad, Ultrasonic spray coating of liquid precursor for low K dielectric coatings.
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