초록

A calibration instrument for calibrating a temperature probe, such as pyrometer. The calibration instrument uses two stable light sources, such as light emitting diodes, to simulate a blackbody of a known temperature.

대표청구항 ▼

[ What is claimed is:] [1.] An apparatus for calibrating a temperature probe that measures the temperature of a substrate, comprising:a) a first light source having a first spectral range;b) a second light source having a second spectral range, the second spectral range different from the first spec

[ What is claimed is:] [1.] An apparatus for calibrating a temperature probe that measures the temperature of a substrate, comprising:a) a first light source having a first spectral range;b) a second light source having a second spectral range, the second spectral range different from the first spectral range; andc) means for combining the light from the first and second light sources and directing the combined light to a light emitting region, wherein the relative intensities of the first and second light sources are selected such that a radiation spectrum emitted from the light emitting region substantially simulates a radiation spectrum of a blackbody at a predetermined temperature over a predetermined wavelength range. [2.] A method of calibrating a calibration instrument, comprising:a) generating light from a first light source in the calibration instrument, the light from the first light source having a first spectral range;b) generating light from a second light source in the calibration instrument, the light from the second light source having a second spectral range different from the first spectral range;c) combining the light from the first and second light sources;d) measuring the intensity of the combined light at a first wavelength;e) measuring the intensity of the combined light at a second wavelength; andf) adjusting the relative intensities of the first and second light sources such that a ratio of the intensity at the first wavelength to the intensity at the second wavelength is substantially equal to an intensity ratio predicted for a blackbody at a predetermined temperature.