초록 ▼

An accelerometer having a substrate with a cavity therein, a heater extending over the cavity, a pair of temperature sensitive elements extending over the cavity equidistant from the heater, and an electrical conductor couplable to an external power source and operative to pass electrical current th

An accelerometer having a substrate with a cavity therein, a heater extending over the cavity, a pair of temperature sensitive elements extending over the cavity equidistant from the heater, and an electrical conductor couplable to an external power source and operative to pass electrical current through the heater so as to develop a symmetrical temperature gradient in the fluid extending outwardly from the heater to the two temperature sensors. The fluid may be a liquid or a gas surrounding the heater and temperature sensors. Applied acceleration disturbs this symmetry and produces a differential temperature between the two temperature sensors proportional to the acceleration.

대표청구항 ▼

[ I claim:] [1.] An accelerometer, comprising:(a) a substrate having an open space therein;(b) a heater extending across said open space;(c) a pair of temperature sensitive elements extending across said open space, said temperature sensitive elements being located on opposite sides of said heater;

[ I claim:] [1.] An accelerometer, comprising:(a) a substrate having an open space therein;(b) a heater extending across said open space;(c) a pair of temperature sensitive elements extending across said open space, said temperature sensitive elements being located on opposite sides of said heater; and(d) an enclosure extending over said open space including said heater and said temperature sensitive elements and enclosing a non-solid heat transfer medium surrounding said heater and said temperature sensitive elements;wherein said open space, said heater and said temperature sensitive elements are formed by micromachining.