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NTIS 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0426856 (1999-10-26) |
우선권정보 | DE9849700 (1998-10-28) |
발명자 / 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
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인용정보 | 피인용 횟수 : 71 인용 특허 : 7 |
A micro-valve arrangement whose micro-valve has a housing containing two opposite housing layers, between which a valve chamber is delimited, wherein a valve member is located. A fluid duct extending in one housing layer opens into the valve chamber and is controlled by the valve member. By means of
[ What is claimed is:] [1.] A micro-valve arrangement comprising a micro-valve which has a housing produced by a micro-structuring method, such housing having two mutually opposite housing layers, between which a valve chamber is defined, in which a diaphragm- or plate-like valve member is located,
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