초록 ▼

A gas delivery system comprises a common mounting block that supports the components in a predetermined arrangement and defines passageways between components so that a gas can flow through the passageways and components along a predetermined flow path. The mounting block is formed so that at least

A gas delivery system comprises a common mounting block that supports the components in a predetermined arrangement and defines passageways between components so that a gas can flow through the passageways and components along a predetermined flow path. The mounting block is formed so that at least a portion of at least one mechanical part of at least one component is provided in the block, the passageways connect the components together and the remaining portion of each component not formed in the block is removably attached to the block. The electrical circuitry that is used to operate the components is separately provided remote from the components so that replacement of a component replaces those mechanical parts of the components not provided in the block, without requiring the replacement of the electrical components. Finally, a time sharing signal distribution circuit can be used to share electrical control and processing circuits with the components of a plurality of gas sticks of a gas box delivery system.

대표청구항 ▼

[ What is claimed is:] [1.] A one-piece mounting block for supporting and connecting components of a gas delivery system, comprising:opposing first and second end surfaces;top and side surfaces extending between the opposing end surfaces;inlet passageways extending from the first end surface in a di

[ What is claimed is:] [1.] A one-piece mounting block for supporting and connecting components of a gas delivery system, comprising:opposing first and second end surfaces;top and side surfaces extending between the opposing end surfaces;inlet passageways extending from the first end surface in a direction generally towards the second end surface, the inlet passageways being separately connectable to a source of purge gas and a source of process gas;outlet passageways extending from the second end surface of the block in a direction generally towards the first end surface, the outlet passageways being separately connectable to a process chamber and a purge reservoir;a plurality of gas component stations spaced on the top surface between the end surfaces, wherein each of the inlet and the outlet passageways is connected to at least one of the component stations; andconnecting passageways within the block extending generally parallel with the top surface, the connecting passageways connecting the component stations such that, when gas control components are mounted to the component stations of the block, gas flow can be directed from each inlet passageway to one of the outlet passageways, as desired.