초록 ▼

A load port for semiconductor equipment includes a transporting apparatus 18 and/or a moving apparatus 30 for respectively transporting a carrier base 14 and moving a cover 15, using a smaller force until the carrier base 14 and/or the cover 15 reaches a predetermined position that is at a predeterm

A load port for semiconductor equipment includes a transporting apparatus 18 and/or a moving apparatus 30 for respectively transporting a carrier base 14 and moving a cover 15, using a smaller force until the carrier base 14 and/or the cover 15 reaches a predetermined position that is at a predetermined distance from an opening 16 of the equipment. This position is at a distance where it is no longer possible to catch a hand or other object between the carrier base 14 or cover 15 and the semiconductor equipment. Then, the carrier base 14 and/or the cover 15 is transported or moved towards the opening 16 by the transporting apparatus 18 and/or moving apparatus 30 respectively transporting the carrier base 14 and/or moving the cover 15 towards the opening 16 to completely close the opening 16 using a larger force.

대표청구항 ▼

[ What is claimed is:] [1.] A load port for semiconductor manufacturing equipment comprising:a carrier for accommodating a wafer;a carrier base for transporting said carrier, while accommodating a wafer, towards an opening of said semiconductor manufacturing equipment to close said opening;a transpo

[ What is claimed is:] [1.] A load port for semiconductor manufacturing equipment comprising:a carrier for accommodating a wafer;a carrier base for transporting said carrier, while accommodating a wafer, towards an opening of said semiconductor manufacturing equipment to close said opening;a transporting means for transporting said carrier base; andcontrol means to control said transporting means to transport said carrier base toward said opening using a relatively small force until said carrier reaches a predetermined position at a predetermined distance from said opening and then transport said carrier base towards said opening using a force greater than said small force used to move said carrier base to said predetermined position.