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Active vibration isolator 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16M-013/00
출원번호 US-0121214 (1998-07-23)
우선권정보 JP0036301 (1998-02-18)
발명자 / 주소
  • Yasuda Masashi,JPX
  • Itojima Fumiaki,JPX
  • Tsuchiya Masaki,JPX
출원인 / 주소
  • Tokkyokiki Corporation, JPX
대리인 / 주소
    Ostrolenk, Faber, Gerb & Soffen, LLP
인용정보 피인용 횟수 : 30  인용 특허 : 8

초록

By a controller 18 which receives signal input from a first sensor 16 for detecting the vibratory state of an object O to be isolated from vibration and from a second sensor 17 for detecting the vibratory state of an intermediate mass element 13, a signal is outputted to a power input portion 12 of

대표청구항

[What is claimed is:] [1.]an intermediate mass element placed in a space between an object to be isolated from vibration and a supporting surface;a first elastic member having one end fixed to the intermediate mass element and the other end fixed to the object and exerting spring action on the inter

이 특허에 인용된 특허 (8)

  1. Kuriki Nobuharu,JPX, Active engine mount system effective in controlling vertical motion of a vehicle body.
  2. Murray Bruce S. (Winchester MA), Active pneumatic mount.
  3. Kurabayashi Hiroshi (575-28 ; Nakanokuki Tokyo JPX) Omi Toshio (575-28 ; Nakanokuki Tokyo JPX) Miyano Hiroshi (575-28 ; Nakanokuki Tokyo JPX) Fujita Takafumi (575-28 ; Nakanokuki Nagareyama-shi ; Chi, Active/passive damping apparatus.
  4. Huang Zhen (Wuppertal DEX), Controls for a semiactive chassis.
  5. Ikeda Naoki (Higashihiroshima JPX) Takehara Shin (Higashihiroshima JPX), Counter vibration generating power unit mounting device.
  6. Whelpley Gordon E. (Chandler AZ) Thurston John F. (Mesa AZ), Fluidic vibration cancellation mount and method.
  7. Garnjost Kenneth D. (Buffalo NY) Rauch Christopher A. (Holland NY) Rey Gonzalo J. (Batavia NY), Method and apparatus for actively adjusting and controlling a resonant mass-spring system.
  8. Schubert Dale W. (Sudbury MA) Beard Andrew Michael (Winchester MA) Shedd Steven Frank (Plympton MA) Earles ; Jr. Marion Richard (Marlboro MA) Von Flotow Andreas H. (Hood River OR), Stiff actuator active vibration isolation system.

이 특허를 인용한 특허 (30)

  1. Proksch, Roger, Active damping of high speed scanning probe microscope components.
  2. Proksch, Roger, Active damping of high speed scanning probe microscope components.
  3. Noe, Mathieu, Active dynamic beater.
  4. Hanagan, Linda M., Active floor vibration control system.
  5. Kraner, Emil; Lopes, Antonio, Active vibration isolation system.
  6. Kraner, Emil; Lopes, Antonio, Active vibration isolation system.
  7. Warmerdam, Thomas Petrus Hendricus; Vervoordeldonk, Michael Johannes, Actuator arrangement for active vibration isolation using a payload as an inertial reference mass.
  8. Fischer, Juergen; Schoenhoff, Ulrich; Geuppert, Bernhard; Butler, Hans; De Jongh, Robertus Johannes Marinus, Arrangement for actuating an element in a microlithographic projection exposure apparatus.
  9. Anderegg, Roland; Gerhard, Martin; Kaufmann, Kuno; Von Felten, Dominik Anton, Arrangement for providing a pulsing compressive force.
  10. Proksch, Roger; Callahan, Roger C.; Stetter, Frank; Limpoco, Ted; Hohlbach, Sophia; Bemis, Jason; Cleveland, Jason, Automated atomic force microscope and the operation thereof.
  11. Proksch, Roger; Callahan, Roger C.; Stetter, Frank; Limpoco, Ted; Hohlbauch, Sophia; Bemis, Jason; Cleveland, Jason; Geiss, Nicholas, Automated atomic force microscope and the operation thereof.
  12. Butler, Hans; Van Der Wijst, Marc Wilhelmus Maria; De Pee, Joost; De Hoon, Cornelius Adrianus Lambertus; Boschker, Stijn, Combination of structure and an active damping system, and a lithographic apparatus.
  13. Pearson,John B.; Emery,Philip A., Damping of vibrations.
  14. Maltby,John D., Floating platform shock simulation system and apparatus.
  15. Nelson, Peter G., High center of gravity stable pneumatic isolator.
  16. Van Der Wijst, Marc Wilhelmus Maria; Butler, Hans; Kwan, Yim Bun Patrick; Loopstra, Erik Roelof; Geuppert, Bernhard; Oude Nijhuis, Marco Hendrikus Hermanus; Guglielmi Rabe, Rodolfo; Laro, Dick Antonius Hendrikus, Lithographic apparatus and device manufacturing method.
  17. Van Der Wijst, Marc Wilhelmus Maria; Butler, Hans; Loopstra, Erik Roelof; Geuppert, Bernhard; Oude Nijhuis, Marco Hendrikus Hermanus; Guglielmi Rabe, Rodolfo; Kwan, Yim Bun Patrick; Laro, Dick Antonius Hendrikus, Lithographic apparatus and device manufacturing method.
  18. Gerard Johannes Pieter Nijsse NL; Josephus Wilhelmus Spronck NL, Magnetic support system.
  19. Osterberg,David A., Method and system for decoupling structural modes to provide consistent control system performance.
  20. Nelson, Peter G., Pneumatic isolator with barometric insensitivity.
  21. Mathieu Noe FR, Resonant device, such as a striker or load generator.
  22. Lee, Taeoh; Heverly, II, David E.; Hendricks, Matthew W.; Griffin, Maurice; Smith, Michael R., Rotorcraft vibration suppression system in a four corner pylon mount configuration.
  23. Seifert, Michael; Stamps, Frank Bradley; Smith, Michael R.; Heverly, David E., Self tuning vibration absorber.
  24. Seifert, Michael; Stamps, Frank Bradley; Smith, Michael R.; Heverly, David E., Self tuning vibration isolation system.
  25. Or,Siu Wing; Chan Wong,Lai Wa Helen; Choy,Ping Kong Joseph; Liu,Chou Kee Peter, Tunable vibration absorption device.
  26. Card, James Myrl, Tuneable steering damper using magneto-rheological fluid.
  27. Kraner, Emil; Lopes, Antonio; Nealey, Justin, Vibration isolation system.
  28. Goold, Ryan; Hindle, Timothy, Vibration isolation systems including multi-parameter isolators providing piezoelectric-based damping.
  29. Nawata, Ryo, Vibration reduction apparatus, lithography apparatus, and method of manufacturing article.
  30. Asano, Tosiya, Vibration suppression apparatus and vibration suppression method.
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