초록 ▼

A laser microscope for picking up an image of a specimen at a high speed and a pattern checking apparatus for checking a pattern at a high speed with a high sensitivity can be provided. A plurality of light beams aligned in a first direction are produced from a light source device (1, 10), and these

A laser microscope for picking up an image of a specimen at a high speed and a pattern checking apparatus for checking a pattern at a high speed with a high sensitivity can be provided. A plurality of light beams aligned in a first direction are produced from a light source device (1, 10), and these light beams are projected onto a specimen (7, 30) by an objective lens (6, 29) to form a light spot array on the specimen. The specimen is moved in a direction perpendicular to the light spot array or the light beams are moved by a beam deflecting device in said direction to scan the specimen two-dimensionally. Light beams emanating from the light spots on the specimen are made incident upon corresponding light receiving elements of a linear image sensor (11, 33). In case of checking periodic patterns such as memory cell patterns, a pitch of the light spots is corresponded to a pitch of the patterns, and defects in the patterns can be detected by comparing output signals from respective light receiving elements.

대표청구항 ▼

[What is claimed is:] [1.]a light source means for emitting a plurality of light beams aligned in a first direction;a beam deflecting means for deflecting said plurality of light beams into a second direction perpendicular to said first direction;an objective lens for converging said plurality of li

[What is claimed is:] [1.]a light source means for emitting a plurality of light beams aligned in a first direction;a beam deflecting means for deflecting said plurality of light beams into a second direction perpendicular to said first direction;an objective lens for converging said plurality of light beams and projecting them onto a specimen under inspection to form a fine light spot array on the specimen; anda linear image sensor having a plurality of light receiving elements arranged in a direction corresponding to said light spot array on the specimen;whereby light beams reflected from respective light spots on the specimen are made incident upon corresponding light receiving elements of said linear image sensor by means of said objective lens and beam deflection means.