초록 ▼

A system to diagnose potential malfunctions in semiconductor manufacturing equipment components, this system includes a transducer to monitor component vibration signatures of the semiconductor manufacturing equipment components. This transducer provides an output signal representative of the compon

A system to diagnose potential malfunctions in semiconductor manufacturing equipment components, this system includes a transducer to monitor component vibration signatures of the semiconductor manufacturing equipment components. This transducer provides an output signal representative of the component vibration signature to an electrical circuit. The electrical circuit contains a transmitter which transmits via a carrier signal, a data signal representative of the output signal of the transducer. A computer system receives and stores the data signal. The computer system contains a software application to analyze the data signal and alert a user to differences between the data signal and a historical signal.

대표청구항 ▼

[What is claimed is:] [1.]a transducer to monitor present component vibration signatures of the semiconductor manufacturing equipment components and provide at least one output signal representative of present component vibration;an electrical circuit to read said at least one output signal generate

[What is claimed is:] [1.]a transducer to monitor present component vibration signatures of the semiconductor manufacturing equipment components and provide at least one output signal representative of present component vibration;an electrical circuit to read said at least one output signal generated by said transducer and transmit at least one data signal representative of said present component vibration signatures to a computer system; anda computer system which contains a software application to analyze said at least one data signal wherein said software application comprises:a set of instructions operable to direct said computer to collect said at least one data signal, store data representative of said present vibration signatures in a memory location, andcompare said data to a database of historical component vibration signatures wherein an alert is supplied to a user noting differences between said present component vibration signatures and the historical component vibration signatures.