초록 ▼

In another embodiment, the heat trace includes a shell surrounding the process fluid line and in thermal contact therewith, and the shell has longitudinal holes through which cable heaters are disposed along the length of the process fluid line. Thermocouples are disposed along the length of the hea

In another embodiment, the heat trace includes a shell surrounding the process fluid line and in thermal contact therewith, and the shell has longitudinal holes through which cable heaters are disposed along the length of the process fluid line. Thermocouples are disposed along the length of the heat trace and provide temperature feedback to a controller that controls the amount of heat generated by the cable heaters.

대표청구항 ▼

[What is claimed is:] [1.]a first vacuum chamber that transfers objects;a second vacuum chamber that processes the objects, the second vacuum chamber cooperatively engaged with the first vacuum chamber to transfer the objects therebetween;a fluid line attached to the second vacuum chamber and to a f

[What is claimed is:] [1.]a first vacuum chamber that transfers objects;a second vacuum chamber that processes the objects, the second vacuum chamber cooperatively engaged with the first vacuum chamber to transfer the objects therebetween;a fluid line attached to the second vacuum chamber and to a fluid source that delivers a process fluid to the second vacuum chamber;a heating fluid containment line within which the fluid line is disposed;a heating fluid input to the heating fluid containment line;a heating fluid output from the heating fluid containment line; anda heating element attached to at least part of the heating fluid containment line.