초록

A cluster tool assembly 10, 200, 300 using plasma immersion ion implantation chamber. In some embodiments, the cluster tool assembly also includes a controlled cleaving process chamber, as well as others.

대표청구항 ▼

[What is claimed is:] [1.]a transfer chamber comprising a robot therein;a plasma immersion ion implantation chamber ("PIII") coupled to said transfer chamber;a controlled cleaving process (CCP) chamber adapted to provide energy to a selected region of a substrate to initiate a controlled cleaving ac

[What is claimed is:] [1.]a transfer chamber comprising a robot therein;a plasma immersion ion implantation chamber ("PIII") coupled to said transfer chamber;a controlled cleaving process (CCP) chamber adapted to provide energy to a selected region of a substrate to initiate a controlled cleaving action, the CCP chamber adapted to provide energy from a thermal source or sink, a mechanical source, a chemical source, or an electrical source, andat least a third chamber coupled to said transfer chamber, whereby the transfer chamber permits a plurality of process steps on a plurality of wafers in the other chambers without breaking vacuum.