초록 ▼

Batch fabrication of thin film structures can be facilitated by sandwiching a thin film between a first and a second polymeric or elastomeric layers. The sandwiched layer can be machined to define a thin film structure, typically a micoroelectromechanical element. This element is separated from the

Batch fabrication of thin film structures can be facilitated by sandwiching a thin film between a first and a second polymeric or elastomeric layers. The sandwiched layer can be machined to define a thin film structure, typically a micoroelectromechanical element. This element is separated from the sandwiching layers by adhesive attachment to a target substrate.

대표청구항 ▼

[What is claimed is:] [1.]sandwiching a thin film between a first layer and a substantially rigid second layer, wherein the second layer is a polymeric membrane comprising a support layer and an elastomeric layer, with the elastomeric layer affixable to the thin film;machining the thin film and the

[What is claimed is:] [1.]sandwiching a thin film between a first layer and a substantially rigid second layer, wherein the second layer is a polymeric membrane comprising a support layer and an elastomeric layer, with the elastomeric layer affixable to the thin film;machining the thin film and the first layer to define a thin film structure;separating the first layer and an unneeded portion of the thin film from the defined thin film structure and the second layer; andattaching the thin film structure on the substantially rigid second layer to a target substrate.