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특허 상세정보

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내보내기 페이스북 공유 카카오톡 공유

Thin film structure machining and attachment

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B32B-031/18   
미국특허분류(USC) 156/241 ; 156/230 ; 156/233 ; 156/247 ; 156/250 ; 156/256 ; 156/267
출원번호 US-0022173 (1998-02-11)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Oliff & Berridge, PLC
인용정보 피인용 횟수 : 39  인용 특허 : 4
초록

Batch fabrication of thin film structures can be facilitated by sandwiching a thin film between a first and a second polymeric or elastomeric layers. The sandwiched layer can be machined to define a thin film structure, typically a micoroelectromechanical element. This element is separated from the sandwiching layers by adhesive attachment to a target substrate.

대표
청구항
▼

[What is claimed is:] [1.]sandwiching a thin film between a first layer and a substantially rigid second layer, wherein the second layer is a polymeric membrane comprising a support layer and an elastomeric layer, with the elastomeric layer affixable to the thin film;machining the thin film and the first layer to define a thin film structure;separating the first layer and an unneeded portion of the thin film from the defined thin film structure and the second layer; andattaching the thin film structure on the substantially rigid second layer to a target ...

이 특허에 인용된 특허 (4)

  1. Bechmann Peter (Auweg 3 D-8114 Uffing/Staffelsee DEX). Method and a device of stripping laminated foil cuttings. USP1993105252169.
  2. Wright Antony P. (Midland County MI). Method for controlling release forces in release coatings. USP1991014985274.
  3. Sakota Mitsushi (4-9-8 Kibogaoka ; Chikusa ; Nagoya JA). Signboard using marcromolecular elastomer having adhesive layer. USP1977044016665.
  4. Quick Charles E. (Middletown NY) Quick Jamie R. (Middletown NY). Thin genuine gold sign making film. USP1994085338615.

이 특허를 인용한 특허 피인용횟수: 39

  1. Benslimane, Mohamed Yahia. Capacitive transducer and a method for manufacturing a transducer. USP2014118891222.
  2. Koning, Paul A.; Matayabas, Jr., James C.. Component packaging apparatus, systems, and methods. USP2010107816171.
  3. Koning,Paul A.; Matayabas, Jr.,James C. Component packaging apparatus, systems, and methods. USP2008047365414.
  4. Lofquist, Alan K.; Battrell, C. Frederick; Bouzek, Heather K.. Device for preparation and analysis of nucleic acids. USP20181010087440.
  5. Benslimane, Mohamed Yahia; Gravesen, Peter. Dielectric actuator or sensor structure and method of making it. USP2009087573064.
  6. Benslimane, Mohamed Yahia; Gravesen, Peter. Dielectric actuator or sensor structure and method of making it. USP2010087785905.
  7. Benslimane, Mohamed Yahia; Gravesen, Peter. Dielectric composite and a method of manufacturing a dielectric composite. USP2009047518284.
  8. Benslimane, Mohamed Yahia; Gravesen, Peter. Dielectric composite and a method of manufacturing a dielectric composite. USP2011027880371.
  9. Clausen, Jorgen M.; Benslimane, Mohamed Yahia. Direct acting capacitive transducer. USP2010067732999.
  10. Benslimand,Mohamed Yahia; Gravesen,Peter. Elastomer actuator and a method of making an actuator. USP2008077400080.
  11. Munch-Fals, Jakob; Benslimane, Mohamed Yahia; Gravesen, Peter; Stenstroem, Theiss. Electro active elastic compression bandage. USP2011017868221.
  12. Dantanarayana, Muditha Pradeep; Nasr, Saad. Flow regulation vent. USP2017119808594.
  13. Dantanarayana, Muditha Pradeep; Nasr, Saad. Flow regulation vent. USP20190310220179.
  14. Dantanarayana, Muditha Pradeep; Nasr, Saad. Flow regulation vent. USP2013058439035.
  15. Dantanarayana, Muditha Pradeep; Nasr, Saad. Flow regulation vent. USP2016039278186.
  16. Kolb, Andrew; Sprague, Isaac; Kay, Justin L.; Bragd, Matthew Scott; Stone, Martha. Fluidic circuits and related manufacturing methods. USP20180910065186.
  17. Robert W. Steenberge. Laminate-based apparatus and method of fabrication. USP2002066410360.
  18. Wendy D. Bennett ; Donald J. Hammerstrom ; Peter M. Martin ; Dean W. Matson. Laminated microchannel devices, mixing units and method of making same. USP2002126494614.
  19. Thomas, Adrian; Davies, Jonathan; Dickinson, Peter Hugh. Laser removal of layer or coating from a substrate. USP2009127632420.
  20. Spooner, Timothy R.; Harney, Kieran P.. Method and device for protecting micro electromechanical system structures during dicing of a wafer. USP2003046555417.
  21. Felton, Lawrence E.; Luo, Jing. Method and device for protecting micro electromechanical systems structures during dicing of a wafer. USP2004076759273.
  22. Spooner, Timothy R.; Courage, David S.; Workman, Brad. Method and device for protecting micro electromechanical systems structures during dicing of a wafer. USP2005096946366.
  23. Spooner, Timothy R.; Harney, Kieran P.; Courage, David S.; Martin, John R.. Method and device for protecting micro electromechanical systems structures during dicing of a wafer. USP2005096946326.
  24. Spooner,Timothy R.; Courage,David S.; Workman,Brad. Method and device for protecting micro electromechanical systems structures during dicing of a wafer. USP2006047022546.
  25. Biegelsen, David Kalman; Swartz, Lars Erik. Method for cutting a member to form a desired structure. USP2004106802927.
  26. Corrigan, Thomas R.J.. Method of forming microstructures with a template. USP2010037670543.
  27. Benslimane, Mohamed Yahia; Gravesen, Peter. Method of making a multilayer composite. USP2012058181338.
  28. Benslimane, Mohamed Yahia; Gravesen, Peter. Method of making a rolled elastomer actiuator. USP2011037895728.
  29. Arya,Satya Prakash. Method of manufacturing a suspension using coining. USP2007107283330.
  30. Bouzek, Heather K.. Methods for preparation of nucleic acid-containing samples using clay minerals and alkaline solutions. USP20190110190153.
  31. Benslimane, Mohamed Yahia; Gravesen, Peter. Multilayer composite and a method of making such. USP2009067548015.
  32. Okubora,Akihiko; Ogawa,Tsuyoshi. Optical waveguide and method for producing same. USP2007017163598.
  33. Tourino, Cory G.; Rice, Janet L.; Flynn, Gregory. Packaging of MEMS devices using a thermoplastic. USP2004106809412.
  34. Poole, Alan David; Oubaek, Jakob. Polymer transducer and a connector for a transducer. USP2014048692442.
  35. Battrell, C. Frederick; Sprague, Isaac; Bragd, Matthew Scott; Capodanno, Jason. Sample-to-answer microfluidic cartridge. USP2018029895692.
  36. Tsuji,Hiroyuki; Kitamura,Kazumasa. Structure of retaining cut-processed components, method of fabricating cut-processed components, tray for housing cut-processed components, and method of cleaning cut-processed components. USP2006107122091.
  37. Bolognese, Luca; D'Angelo, Giuseppe; Pasquettaz, Giorgio. System for the control of the quality of a laser cut or perforation, in particular for sheets of metal. USP2004016674044.
  38. Gravesen,Peter; Benslimane,Mohamed Yahia. Tactile sensor element and sensor array. USP2009017481120.
  39. Mikael Wickstrom SE; Jan Jonsson SE; Vilhelm Oskarsson SE. Top contact VCSEL with monitor. USP2002046368890.

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