초록 ▼

The disclosure relates to a vaporizer valve which accepts a carrier gas and a pressurized liquid and forms a mixture of the carrier gas and vaporized liquid. An internal cavity receives the carrier gas through a carrier aperture and the liquid through a liquid aperture, and the mixed gas and vapor a

The disclosure relates to a vaporizer valve which accepts a carrier gas and a pressurized liquid and forms a mixture of the carrier gas and vaporized liquid. An internal cavity receives the carrier gas through a carrier aperture and the liquid through a liquid aperture, and the mixed gas and vapor are exhausted out of the cavity via a third aperture. A moveable diaphragm disposed adjacent to the liquid aperture forms a vaporization region having a pressure gradient. The liquid passing through this pressure gradient vaporizes due to expansion. By controlling the diaphragm position with a feedback control circuit responsive to a liquid flow rate monitor, the liquid flow rate may be controlled independently of the carrier gas flow rate.

대표청구항 ▼

[ What is claimed is:] [1.]1. A vaporizer for vaporizing a liquid and mixing the vaporized liquid with a carrier gas, the vaporizer comprising:a valve body having a first aperture and a third aperture formed therein, the valve body having a valve seat with a second aperture formed therein;a gas inle

[ What is claimed is:] [1.]1. A vaporizer for vaporizing a liquid and mixing the vaporized liquid with a carrier gas, the vaporizer comprising:a valve body having a first aperture and a third aperture formed therein, the valve body having a valve seat with a second aperture formed therein;a gas inlet port formed in the valve body and connected to the first aperture through a first fluid channel;a liquid inlet port formed in the valve body and connected to the second aperture through a second fluid channel;a proportional control valve disposed adjacent to and opposite the second aperture and the valve seat to define a volume therebetween, the position of the proportional control valve being continuously adjustable over a continuous range of settings from a fully closed position to a fully open position; andan outlet port of the valve body connected to the third aperture through a third fluid channel.