초록 ▼

Apparatus for producing a wet oxygen stream for a semiconductor furnace to form oxide layers on silicon wafers. A quartz vessel with quartz chips is heated to 450.degree. C. and a mixture of water and oxygen is introduced at the bottom of the vessel. Vaporization occurs at the input of the water and

Apparatus for producing a wet oxygen stream for a semiconductor furnace to form oxide layers on silicon wafers. A quartz vessel with quartz chips is heated to 450.degree. C. and a mixture of water and oxygen is introduced at the bottom of the vessel. Vaporization occurs at the input of the water and oxygen into the vessel. The output of wet oxygen as superheated stream passes through the chips and is taken from the top of the vessel to the furnace. The quartz vessel is nested in an aluminum body containing heaters to maintain constant temperature. The ratio of water vapor to oxygen in the wet stream is constant to produce layers of predictable characteristics.

대표청구항 ▼

[ What is claimed is:] [1.]1. Apparatus for generating a high temperature mixture of gases, the stream being supplied to a furnace for the production of oxide films on semiconductor wafers, said apparatus comprising:a) an open quartz vessel;b) a quartz cover having input and output ports and dimensi

[ What is claimed is:] [1.]1. Apparatus for generating a high temperature mixture of gases, the stream being supplied to a furnace for the production of oxide films on semiconductor wafers, said apparatus comprising:a) an open quartz vessel;b) a quartz cover having input and output ports and dimensioned to close the vessel;c) an input tube extending from the input port to a level proximate to the bottom of the vessel;d) means for delivering a mixture of gas and liquid to the input tube;e) an output tube extending from the output port to a region proximate to the cover;f) a multiplicity of inert chips contained in the vessel and surrounding the input tube;g) a body of high thermal conductivity material having a central opening for receiving and contacting the vessel; andh) means for heating the body and elevating the temperature of the vessel and inert chips therein, the mixture of gas and liquid being vaporized and exiting the vessel through the output tube.