초록 ▼

The present invention provides a bladder assembly 130 for use in an electroplating cell 100. The bladder assembly 130 comprises a mounting plate 132, a bladder 136, and an annular manifold 146. One or more inlets 142 are formed in the mounting plate 146 and are coupled to a fluid source 138. The man

The present invention provides a bladder assembly 130 for use in an electroplating cell 100. The bladder assembly 130 comprises a mounting plate 132, a bladder 136, and an annular manifold 146. One or more inlets 142 are formed in the mounting plate 146 and are coupled to a fluid source 138. The manifold 146 is adapted to be received in a recess 140 formed in the lower face of the mounting plate 132 and secures the bladder 136 thereto. Outlets 154 formed in the manifold 146 communicate with the inlets 142 to route a fluid from the fluid source 138 into the bladder 136 to inflate the same. A substrate 121 disposed on a contact ring 114 opposite the bladder 136 is thereby selectively biased toward a seating surface of the contact ring 114. A pumping system 159 coupled at the backside of the substrate 121 provides a pressure or vacuum condition.

대표청구항 ▼

[ What is claimed is:] [1.]1. An inflatable bladder assembly for loading a substrate in an electroplating cell, the inflatable bladder assembly comprising:a) a substrate mounting plate comprising one or more fluid inlets;b) an inflatable bladder secured to the substrate mounting plate and in communi

[ What is claimed is:] [1.]1. An inflatable bladder assembly for loading a substrate in an electroplating cell, the inflatable bladder assembly comprising:a) a substrate mounting plate comprising one or more fluid inlets;b) an inflatable bladder secured to the substrate mounting plate and in communication with the one or more fluid inlets;c) a fluid source coupled to the one or more fluid inlets;d) a port formed in the substrate mounting plate; ande) a vacuum/pressure pumping system coupled to the port and capable of selectively supplying a vacuum or pressure. [28.]28. A method for securing a substrate to a seating surface for processing in an electrolytic cell, comprising:a) providing an inflatable bladder opposite the seating surface, wherein the inflatable bladder is secured to a substrate mounting member comprising a port, and wherein the port is coupled to a vacuum/pressure system capable of selectively applying a vacuum or pressure;b) disposing the substrate on the seating surface by applying a vacuum to the port; andc) inflating the inflatable bladder to bias the substrate onto the seating surface.