초록 ▼

A monitoring system and method for monitoring a clean room regulating system. The monitoring system includes a particle counter with a pump having a pumping state for pumping a fluid containing particles. The particle counter produces an analog particle signal indicative of an amount of particles de

A monitoring system and method for monitoring a clean room regulating system. The monitoring system includes a particle counter with a pump having a pumping state for pumping a fluid containing particles. The particle counter produces an analog particle signal indicative of an amount of particles detected. The particle counter also produces a pump-state signal corresponding to the pumping state. A signal processor is included for converting the analog particle signal into a first digital signal, for converting the pump-state signal into an analog pumping signal, and for converting the analog pumping signal into a second digital signal. A host computer is included for receiving the first digital signal and deriving the amount of particles detected, for receiving the second digital signal and deriving the pumping state, and for monitoring the pumping state and the amount of particles counted. The system includes a communication channel for transferring the first digital signal and the second digital signal from the signal processor to the host computer.

대표청구항 ▼

[ What is claimed is:] [1.]1. A monitoring system for monitoring a clean room regulating system, comprising:a particle counter comprising a pump having a pumping state for pumping a fluid containing particles, the particle counter producing an analog particle signal corresponding to an amount of par

[ What is claimed is:] [1.]1. A monitoring system for monitoring a clean room regulating system, comprising:a particle counter comprising a pump having a pumping state for pumping a fluid containing particles, the particle counter producing an analog particle signal corresponding to an amount of particles detected, and producing a pump-state signal corresponding to the pumping state;a signal processor, coupled to the particle counter, that converts the analog particle signal into a first digital signal, converts the pump-state signal into an analog pumping signal, and converts the analog pumping signal into a second digital signal;a host computer that receives the first digital signal and derives the amount of particles detected, receives the second digital signal and derives the pumping state, and monitors the pumping state and the amount of particles detected; anda communication channel that transfers the first digital signal and the second digital signal from the signal processor to the host computer.