초록 ▼

A method and apparatus for monitoring and controlling temperatures at a semiconductor circuit (22) by an array (32) of thermoelectric cooler cells (34) which are disposed proximate the semiconductor circuit (22). At least one thermoelectric cooler (38) is located at the individual thermoelectric coo

A method and apparatus for monitoring and controlling temperatures at a semiconductor circuit (22) by an array (32) of thermoelectric cooler cells (34) which are disposed proximate the semiconductor circuit (22). At least one thermoelectric cooler (38) is located at the individual thermoelectric cooler cells (34) for removing and adding heat from cell areas associated with the thermoelectric coolers. A memory device (50) is associated with the cooler cells (34) and stores operational settings for the cooler cells. A controller (28) is coupled with the thermoelectric cooler cells (34) to individually control the operational settings for the cooler cells in the array (32).

대표청구항 ▼

[ What is claimed is:] [1.]1. An apparatus for monitoring and controlling temperatures at a semiconductor circuit comprising:an array of thermoelectric cooler cells disposed proximate the semiconductor circuit;a plurality of thermoelectric coolers with at least one thermoelectric cooler located at i

[ What is claimed is:] [1.]1. An apparatus for monitoring and controlling temperatures at a semiconductor circuit comprising:an array of thermoelectric cooler cells disposed proximate the semiconductor circuit;a plurality of thermoelectric coolers with at least one thermoelectric cooler located at individual ones of the thermoelectric cooler cells for selectively removing and adding heat from a cell area associated with the thermoelectric cooler;a memory device associated with the thermoelectric cooler cells for storing operational settings for the thermoelectric cooler cells; anda controller coupled with the thermoelectric coolers for individually controlling the operational settings for the thermoelectric cooler cells of the array.