초록 ▼

In production of a semiconductor device using an SOI technology by an adhesion method, a thin film with high thermal conductivity is formed between an insulating supporting substrate and a single-crystal silicon film formed thereon to enhance uniformity of a thermal distribution. The single-crystal

In production of a semiconductor device using an SOI technology by an adhesion method, a thin film with high thermal conductivity is formed between an insulating supporting substrate and a single-crystal silicon film formed thereon to enhance uniformity of a thermal distribution. The single-crystal silicon film is subjected to thermal treatment to improve uniformity of the thermal distribution and to enhance the adhesion strength during an adhesion step. When a peripheral circuit provided with switching elements showing a large amount of heat generation is formed of semiconductor devices having a thin film with high thermal conductivity to enhance the heat-dissipating function, temperature rise during the operation is suppressed. When the thin film with high thermal conductivity is composed of a light-shielding material, the light-shielding function is also improved. Accordingly, temperature rise and deterioration of the characteristics of the switching element due to incident light can be suppressed.

대표청구항 ▼

[ What is claimed is:] [1.]1. A method for making a semiconductor device comprising:forming a thermally conductive film having a thermal conductivity higher than thermal conductivity of a supporting substrate on one surface of the supporting substrate;forming a first insulating film on the thermally

[ What is claimed is:] [1.]1. A method for making a semiconductor device comprising:forming a thermally conductive film having a thermal conductivity higher than thermal conductivity of a supporting substrate on one surface of the supporting substrate;forming a first insulating film on the thermally conductive film; andadhering a single-crystal semiconductor film onto the first insulating film by heat treatment.