$\require{mediawiki-texvc}$
  • 검색어에 아래의 연산자를 사용하시면 더 정확한 검색결과를 얻을 수 있습니다.
  • 검색연산자
검색도움말
검색연산자 기능 검색시 예
() 우선순위가 가장 높은 연산자 예1) (나노 (기계 | machine))
공백 두 개의 검색어(식)을 모두 포함하고 있는 문서 검색 예1) (나노 기계)
예2) 나노 장영실
| 두 개의 검색어(식) 중 하나 이상 포함하고 있는 문서 검색 예1) (줄기세포 | 면역)
예2) 줄기세포 | 장영실
! NOT 이후에 있는 검색어가 포함된 문서는 제외 예1) (황금 !백금)
예2) !image
* 검색어의 *란에 0개 이상의 임의의 문자가 포함된 문서 검색 예) semi*
"" 따옴표 내의 구문과 완전히 일치하는 문서만 검색 예) "Transform and Quantization"

통합검색

도움말도움말
상세검색 다국어 입력

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Temperature compensated microelectromechanical structures and related methods

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) H02N-011/00    H01G-007/00    F01L-001/00   
미국특허분류(USC) 310/307
출원번호 US-0261483 (1999-02-26)
발명자 / 주소
  • Hill Edward
  • Wood Robert L.
  • Mahadevan Ramaswamy
출원인 / 주소
  • JDS Uniphase Inc., CAX
대리인 / 주소
    Myers Bigel Sibley & Sajovec
인용정보 피인용 횟수 : 22  인용 특허 : 28
초록
▼

MEMS structures are provided that compensate for ambient temperature changes, process variations, and the like, and can be employed in many applications. These structures include an active microactuator adapted for thermal actuation to move in response to the active alteration of its temperature. The active microactuator may be further adapted to move in response to ambient temperature changes. These structures also include a temperature compensation element, such as a temperature compensation microactuator or frame, adapted to move in response to ambien...

대표
청구항
▼

[ That which is claimed:] [1.]1. A temperature compensated microelectromechanical structure, comprising:a microelectronic substrate having a first major surface;a temperature compensation microactuator, disposed upon the first major surface of said microelectronic substrate and configured to move a first distance in a direction in response to a change in ambient temperature; andan active microactuator, disposed upon the first major surface of said microelectronic substrate that is configured to move the first distance in the same direction to maintain a ...

인용문헌 (28)

  1. Carr William N. ; Sun Xi-qing, Cantilevered microstructure.
  2. Zhang Z. Lisa (Ithaca NY) MacDonald Noel C. (Ithaca NY), Compound stage MEM actuator suspended for multidimensional motion.
  3. Kaufmann James (19845 State Rte. P Newburg MO 65550) Moss Mary G. (12901 County Rd. 3000 Rolla MO 65401) Giedd Ryan E. (1724 W. Highland St. Springfield MO 65807) Brewer Terry L. (17971 County Rd. 84, Conducting-polymer bolometer.
  4. Adams Lowell J. (Dayton OH), Deicer assembly utilizing shaped memory metals.
  5. Takeda Hideaki (Misato JPX), Double safety thermostat having movable contacts disposed in both ends of a resilient plate.
  6. Culp Gordon W. (Van Nuys CA), Entropic electrothermal actuator with walking feet.
  7. Haake John M. (St. Charles MO), Fiber optic connector having at least one microactuator for precisely aligning an optical fiber and an associated fabric.
  8. Ghezzo Mario (Ballston Lake NY) Yakymyshyn Christopher P. (Raleigh NC) Duggal Anil R. (Schenectady NY), Integrated microelectromechanical polymeric photonic switching arrays.
  9. Honma Dai (Tokyo JPX), Linear motion actuator utilizing extended shape memory alloy member.
  10. Petersen Kurt (San Jose CA) Pourahmadi Farzad (Fremont CA) Craddock Russell (Birmingham GB2), Method and apparatus for thermally actuated self testing of silicon structures.
  11. Trah Hans-Peter (Reutlingen DEX) Flik Gottfried (Leonberg DEX), Micro-actuator.
  12. Haake John M. (St. Charles MO), Microactuator for precisely aligning an optical fiber and an associated fabrication method.
  13. Haake John Martin, Microactuator for precisely positioning an optical fiber and an associated method.
  14. Dhuler Vijayakumar R. ; Wood Robert L., Microelectromechanical positioning apparatus.
  15. Field Leslie A. (Portola Valley CA) Ruby Richard C. (Menlo Park CA), Micromachined bi-material signal switch.
  16. Guckel Henry (Madison WI) Klein Jonathan L. (Madison WI) Earles Thomas L. (Madison WI), Micromechanical magnetically actuated devices.
  17. Fitch Joseph P. ; Hagans Karla ; Clough Robert ; Matthews Dennis L. ; Lee Abraham P. ; Krulevitch Peter A. ; Benett William J. ; Da Silva Luiz ; Celliers Peter M., Microminiaturized minimally invasive intravascular micro-mechanical systems powered and controlled via fiber-optic cable.
  18. Saif Muhammad T. A. ; Huang Trent ; MacDonald Noel C., Micromotion amplifier.
  19. Marcus Robert B. (133 Colchester Rd. Murray Hill NJ 07974) Carr William N. (W. Milford NJ), Microprobe.
  20. MacDonald Noel C. (Ithaca NY) Yao Jun J. (Ithaca NY), Multi-dimensional precision micro-actuator.
  21. Shimada Toshio (Tochigi JPX) Kobayashi Morio (Oyama JPX) Tada Takemi (Tochigi JPX) Kawaminami Shigeya (Tochigi JPX), Overload protective device.
  22. Dewispelaere Andre,BEX, Shed forming device for a textile machine with actuator means.
  23. Reay Richard J. (Palo Alto CA) Klaassen Erno H. (San Jose CA), Suspended single crystal silicon structures and method of making same.
  24. Deacutis James J. (Hanover NH) Henning Albert K. (Norwich VT), Switchable thermoelectric element and array.
  25. Dalto Michael (1494 Sweetman Ave. Elmont NY 11003), Temperature regulated specimen transporter.
  26. Wood Robert L. ; Dhuler Vijayakumar R., Thermal arched beam microelectromechanical actuators.
  27. Dhuler Vijayakumar R. ; Wood Robert L. ; Mahadevan Ramaswamy, Thermal arched beam microelectromechanical switching array.
  28. Pylkki Russell J. (Arcadia CA) Schuman Marc (San Francisco CA) West Paul E. (Cupertino CA), Thermal sensing scanning probe microscope and method for measurement of thermal parameters of a specimen.

이 특허를 인용한 특허 (22)

  1. Aase,Jan H.; Browne,Alan L.; Johnson,Nancy L.; Ulicny,John C., Airflow control devices based on active materials.
  2. Mc Knight,Geoffrey P.; Massey,Cameron; Herrera,Guillermo A.; Barvosa Carter,William; Johnson,Nancy L.; Browne,Alan L., Airflow control devices based on active materials.
  3. McKnight, Geoffrey P.; Massey, Cameron; Herrera, Guillermo A.; Barvosa-Carter, William; Johnson, Nancy L.; Browne, Alan L., Airflow control devices based on active materials.
  4. McKnight, Geoffrey P.; Massey, Cameron; Herrera, Guillermo A.; Barvosa-Carter, William; Johnson, Nancy L.; Browne, Alan L., Airflow control devices based on active materials.
  5. Aase,Jan H.; Browne,Alan L.; Johnson,Nancy L.; Ulicny,John C., Airflow control devices using current.
  6. Aase,Jan H.; Browne,Alan L.; Johnson,Nancy L.; Ulicny,John C., Airflow control devices with planar surfaces.
  7. Chase, Steven M.; Chang-Hasnain, Connie J.; Waite, Jeffrey Michael, Apparatus and method for controlled cantilever motion through torsional beams and a counterweight.
  8. Browne,Alan L.; Johnson,Nancy L.; Juechter,Tadge J.; Moss,Edward D.; Aase,Jan H.; Froling,Thomas H.; Jones,Gary L.; Khalighi,Bahram; Koromilas,Constantinos A.; Charles,Harlan W.; McKnight,Geoffrey P., Control logic for fluid flow control devices.
  9. Liu, Yanning; Ferris, Timothy A., Data storage device adjusting range of microactuator digital-to-analog converter based on operating temperature.
  10. Agrawal, Vivek; Wood, Robert L.; Mahadevan, Ramaswamy, MEMS microactuators located in interior regions of frames having openings therein and methods of operating same.
  11. Kubby, Joel A.; Feinberg, Kathleen A.; German, Kristine A.; Gulvin, Peter M.; Ma, Jun; Lin, Pinyen, MEMS waveguide shuttle optical latching switch.
  12. Bernstein,Jonathan J.; Taylor,William P., Metal alloy elements in micromachined devices.
  13. Browne,Alan L.; Johnson,Nancy L., Method for controlling airflow.
  14. Vijayakumar R. Dhuler ; Mark David Walters, Microelectromechanical valves including single crystalline material components.
  15. Vijayakumar R. Dhuler ; Mark David Walters ; Edward A. Hill ; Allen Bruce Cowen, Moveable microelectromechanical mirror structures and associated methods.
  16. Jong Hyun Lee KR; Myung Lae Lee KR, Optical switch incorporating therein shallow arch leaf springs.
  17. Anderson, Daryl E.; Martin, Eric, Temperature compensated MEMS device.
  18. Kubby,Joel A.; Ma,Jun; German,Kristine A.; Gulvin,Peter M.; Lin,Pinyen, Thermal actuator and an optical waveguide switch including the same.
  19. Ma,Jun; Kubby,Joel A.; German,Kristine A.; Gulvin,Peter M.; Lin,Pinyen, Thermal actuator and an optical waveguide switch including the same.
  20. Ma,Jun; Kubby,Joel A.; German,Kristine A.; Gulvin,Peter M.; Lin,Pinyen, Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same.
  21. Howell, Larry L.; Lyon, Scott, Thermomechanical in-plane microactuator.
  22. Earle, Matthew S., Tunable mechanical temperature compensator.

IPC 상위 출원인