초록 ▼

A first insulator is formed on a base layer. A first conductor is formed on the first insulator. The first conductor is patterned. A second insulator is formed over the first insulator. A via hole is formed in the second insulator and is electrically coupled to the first conductor through the via ho

A first insulator is formed on a base layer. A first conductor is formed on the first insulator. The first conductor is patterned. A second insulator is formed over the first insulator. A via hole is formed in the second insulator and is electrically coupled to the first conductor through the via hole. A second conductor is formed on the second insulator, and is electrically coupled to the first conductor by the via hole. The second conductor is patterned. A cavity is formed under the second conductor, and in the first and second insulators.

대표청구항 ▼

[ We claim:] [1.]1. An inductive element on a substrate, comprising:a base layer;a first insulator formed on the base layer;a first conductor formed on the first insulator;a second insulator formed on the first insulator;a second conductor, having first and second branches that are substantially par

[ We claim:] [1.]1. An inductive element on a substrate, comprising:a base layer;a first insulator formed on the base layer;a first conductor formed on the first insulator;a second insulator formed on the first insulator;a second conductor, having first and second branches that are substantially parallel, formed on the second insulator;a via hole, formed in the second insulator, coupling the first and second conductors;a cavity, under the second conductor, formed in the first and second insulators; anda support structure, in the cavity, propping up the second conductor above the base layer.