초록 ▼

The present disclosure describes a Parylene micro check valve including a micromachined silicon valve seat with a roughened top surface to which a membrane cap is anchored by twist-up tethers. The micro check valve is found to exhibit low cracking pressure, high reverse pressure, low reverse flow le

The present disclosure describes a Parylene micro check valve including a micromachined silicon valve seat with a roughened top surface to which a membrane cap is anchored by twist-up tethers. The micro check valve is found to exhibit low cracking pressure, high reverse pressure, low reverse flow leakage, and negligible membrane-induced flow resistance when used as a valve over a micro orifice through which flow liquid and gas fluids.

대표청구항 ▼

[ What is claimed is:] [1.]1. A valve assembly comprising:a substrate, having a top surface and a bottom surface, and formed of a material that can be processed using semiconductor processing techniques, forming a valve seat including an orifice dimensioned to direct flow of fluid out from said top

[ What is claimed is:] [1.]1. A valve assembly comprising:a substrate, having a top surface and a bottom surface, and formed of a material that can be processed using semiconductor processing techniques, forming a valve seat including an orifice dimensioned to direct flow of fluid out from said top surface; anda deflectable membrane formed on the top surface of the substrate and including a membrane cap anchored by a plurality of twist-up tethers, the membrane cap being vertically displaceable from the top surface in response to fluid flow through the orifice.