초록 ▼

The present invention provides a technique for controlling a wide range of fluid flow rates through a mass flow controller ("MFC") device 10. The technique includes a device 10 having a novel housing design and a variety of by-pass elements 300, 400 for selectively providing a desired fluid flow ran

The present invention provides a technique for controlling a wide range of fluid flow rates through a mass flow controller ("MFC") device 10. The technique includes a device 10 having a novel housing design and a variety of by-pass elements 300, 400 for selectively providing a desired fluid flow range.

대표청구항 ▼

[ What is claimed is:] [1.]1. A fluid flow control device, said device comprising:a main body:an elongated fluid flow cavity in said main body, said fluid flow cavity being coupled to a fluid inlet;a control valve coupled between said fluid flow cavity and a fluid outlet said control valve coupled t

[ What is claimed is:] [1.]1. A fluid flow control device, said device comprising:a main body:an elongated fluid flow cavity in said main body, said fluid flow cavity being coupled to a fluid inlet;a control valve coupled between said fluid flow cavity and a fluid outlet said control valve coupled to said fluid flow cavity by a first orifice;wherein said elongated fluid flow cavity being disposed underlying a portion of said control valve to increase a fluid flow path of said elongated fluid flow cavity; andwherein said first orifice couples to said fluid flow cavity at an angle that comprises a direction substantially opposite of fluid flow in said fluid flow cavity.