초록 ▼

A fluid dispensing system is provided which has a first diaphragm pump, a filter connected to receive the discharge of said first pump, and an accumulator/second diaphragm pump connected to receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independen

A fluid dispensing system is provided which has a first diaphragm pump, a filter connected to receive the discharge of said first pump, and an accumulator/second diaphragm pump connected to receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independently actuate each of the diaphragm pumps, providing accurate, controllable and repeatable dispense of the subject fluid. The system further includes a suck-back device downstream of the second pump.

대표청구항 ▼

[ What is claimed is:] [1.]1. A method of dispensing a fluid for use within the microelectronics industry, including the steps of:pumping said fluid with first pumping means; receiving said fluid by operating second pumping means; dispensing said fluid from an outlet downstream of said second pumpin

[ What is claimed is:] [1.]1. A method of dispensing a fluid for use within the microelectronics industry, including the steps of:pumping said fluid with first pumping means; receiving said fluid by operating second pumping means; dispensing said fluid from an outlet downstream of said second pumping means; andsucking-back fluid downstream of said second pumping means.