초록 ▼

A cleaning apparatus has a processing tank (21) for containing a processing liquid in which semiconductor wafers (W) are immersed, and a tubular vessel(22a) having a processing chamber (23) containing the processing tank (21). A side wall (26) of the vessel (22a), and a first partition wall (28) hav

A cleaning apparatus has a processing tank (21) for containing a processing liquid in which semiconductor wafers (W) are immersed, and a tubular vessel(22a) having a processing chamber (23) containing the processing tank (21). A side wall (26) of the vessel (22a), and a first partition wall (28) having an upright wall (27) standing on a bottom plate (23a) defining the bottom of the processing chamber (23) form a side ventilating duct (24). The bottom wall (30) of the vessel (22a), and a second partition wall (29) substantially horizontally extending from the lower end of the first partition wall (28) form a bottom ventilating duct (25). The side ventilating duct (24) and the bottom ventilating duct (25) can compactly arrange devices and pipes for supplying and discharging the cleaning liquid for cleaning semiconductor wafers (W), easily maintain the devices and pipes, easily arrange a ventilating system to the cleaning apparatus, and improve ventilation efficiency.

대표청구항 ▼

[ What is claimed is:] [1.]1. A cleaning apparatus comprising:a cleaning tank; anda cleaning liquid supply circuit for supplying a cleaning liquid to the cleaning tank, including a pump for pumping the cleaning liquid, a temperature regulator for regulating the temperature of the cleaning liquid and

[ What is claimed is:] [1.]1. A cleaning apparatus comprising:a cleaning tank; anda cleaning liquid supply circuit for supplying a cleaning liquid to the cleaning tank, including a pump for pumping the cleaning liquid, a temperature regulator for regulating the temperature of the cleaning liquid and a filter for filtering the cleaning liquid; wherein:the pump has an inlet port and an outlet port formed on one side surface thereof;the temperature regulator has an inlet port and an outlet port formed in one side surface thereof;the filter has an inlet port and an outlet port formed in one surface thereof; andthe pump, the temperature regulator and the filter are disposed so that the inlet and the outlet port of the pump, the inlet and the outlet port of the temperature regulator, and the inlet and the outlet port of the filter face substantially one plane.