$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Fluid control device

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-011/20
출원번호 US-0389475 (1999-09-03)
우선권정보 JP0116204 (1996-05-10)
발명자 / 주소
  • Ohmi Tadahiro,JPX
  • Hirao Keiji,JPX
  • Minami Yukio,JPX
  • Yamaji Michio,JPX
  • Hirose Takashi,JPX
  • Ikeda Nobukazu,JPX
출원인 / 주소
  • Fujikin Incorporated, JPX
대리인 / 주소
    Armstrong, Westerman, Hattori, McLeland & Naughton, LLP
인용정보 피인용 횟수 : 65  인용 특허 : 10

초록

A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is pas

대표청구항

[ What is claimed is:] [1.]1. A method for operating a fluid control device for alternatively passing a first fluid, which is the first in the order of importance of ensuring high purity, or second fluid, which is the second in the order of importance of ensuring higher purity, to a channel in a con

이 특허에 인용된 특허 (10)

  1. Pengler Rudolf (Weehawken NJ), Automatic switchover valve.
  2. George Mark (23 N. 12th St. Allentown PA 18102), Delivery of reactive gas from gas pad to process tool.
  3. Joseph Frank (Gernsheim DEX) Jrgensen Holger (Aachen DEX), Extraction valve head for tanks.
  4. Ohmi Tadahiro,JPX ; Hirao Keiji,JPX ; Minami Yukio,JPX ; Yamaji Michio,JPX ; Hirose Takashi,JPX ; Ikeda Nobukazu,JPX, Fluid control device.
  5. Okumura Katsuya (Yokohama JPX) Sudo Yoshihisa (Niiza JPX) Goshima Kenichi (Kasugai JPX) Itafuji Hiroshi (Kasugai JPX) Kojima Akihiro (Kasugai JPX), Gas supplying system and gas supplying apparatus.
  6. Yokoyama Ikuo (Nobeoka JPX), Non-stagnant piping system.
  7. DeMild ; Jr. Leonard C. (Peabody MA), Radial gas manifold.
  8. Graffunder Horst (Berlin DEX) Wittmann Brigitte (Berlin DEX) Kohls Heinz (Berlin DEX), Valve arrangement for distributing fluids.
  9. Wienke Volker (Lbeck DEX) Scheel Heinrich (Lbeck DEX), Valve for a gas vessel.
  10. Hunkapiller, Michael W., Zero dead volume valve.

이 특허를 인용한 특허 (65)

  1. Deng, David, Control valves for heaters and fireplace devices.
  2. Deng, David, Dual fuel control device with auxiliary backline pressure regulator.
  3. Mateos Martin, Ruben; Antxia Uribetxebarria, José Joaquin, Dual fuel gas heater.
  4. Deng, David, Dual fuel heater.
  5. Deng, David, Dual fuel heater.
  6. Deng, David, Dual fuel heater.
  7. Mateos Martin, Ruben, Dual fuel heater.
  8. Mateos Martin, Ruben, Dual fuel heater.
  9. Mateos Martin, Ruben, Dual fuel heater.
  10. Deng, David, Dual fuel heater with selector valve.
  11. Deng, David, Dual fuel heater with selector valve.
  12. Deng, David, Dual fuel heater with selector valve.
  13. Deng, David, Dual fuel heater with selector valve.
  14. Deng, David, Dual fuel heater with selector valve.
  15. Deng, David, Dual fuel heater with selector valve.
  16. Deng, David, Dual fuel heater with selector valve.
  17. Deng, David, Dual fuel heating assembly with reset switch.
  18. Deng, David, Dual fuel heating source.
  19. Deng, David, Dual fuel heating source.
  20. Deng, David, Dual fuel heating source with nozzle.
  21. Deng, David, Dual fuel heating system.
  22. Deng, David, Dual fuel heating system and air shutter.
  23. Deng, David, Dual fuel heating system and air shutter.
  24. Deng, David, Dual fuel heating system with pressure sensitive nozzle.
  25. Deng, David, Dual fuel valve with air shutter adjustment.
  26. Manning, John Stephen (Steve); Antxia Uribetxebarria, José Joaquín; Mateos Martin, Ruben, Dual fuel vent free gas heater.
  27. Manning, John Stephen (Steve); Antxia Uribetxebarria, José Joaquín; Mateos Martin, Ruben, Dual fuel vent free gas heater.
  28. Manning, Steve, Dual fuel vent free gas heater.
  29. Manning, Steve, Dual fuel vent free gas heater.
  30. Vu, Kim Ngoc, Extreme flow rate and/or high temperature fluid delivery substrates.
  31. Okase, Wataru; Moriya, Shuji; Nakata, Tomohiro; Shinohara, Tsutomu; Yamaji, Michio, Fluid control apparatus.
  32. Vu, Kim Ngoc, Fluid delivery substrates for building removable standard fluid delivery sticks.
  33. Deng, David, Fuel selectable heating devices.
  34. Deng, David, Fuel selection valve assemblies.
  35. Deng, David, Fuel selection valve assemblies.
  36. Otsuki, Hayashi; Miura, Yutaka, Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus.
  37. Otsuki, Hayashi; Miura, Yutaka, Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus.
  38. Deng, David, Gas-fueled heater.
  39. Deng, David, Heat engine with nozzle.
  40. Deng, David, Heater configured to operate with a first or second fuel.
  41. Deng, David, Heater configured to operate with a first or second fuel.
  42. Deng, David, Heater configured to operate with a first or second fuel.
  43. Deng, David, Heater configured to operate with a first or second fuel.
  44. Deng, David, Heating apparatus with air shutter adjustment.
  45. Deng, David, Heating apparatus with fan.
  46. Deng, David, Heating assembly.
  47. Deng, David, Heating assembly.
  48. Deng, David, Heating assembly.
  49. Deng, David, Heating system.
  50. Deng, David, Heating system.
  51. Deng, David, Heating system.
  52. Deng, David, Heating system.
  53. Deng, David, Heating system.
  54. Deng, David, Heating system with pressure regulator.
  55. Manofsky, Jr., William L.; Redemann, Eric J.; Julian, Donald H., Manifold system for gas and fluid delivery.
  56. Vu,Kim, Modular substrate gas panel having manifold connections in a common plane.
  57. Vu,Kim Ngoc, Modular substrate gas panel having manifold connections in a common plane.
  58. Deng, David, Oxygen depletion sensor.
  59. Deng, David, Pilot assemblies for heating devices.
  60. Somani, Bhushan, Real time diagnostics for flow controller systems and methods.
  61. Deng, David, Safety pressure switch.
  62. Deng, David, Valve assemblies for heating devices.
  63. Deng, David, Valve assemblies for heating devices.
  64. Deng, David, Valve assemblies for heating devices.
  65. Deng, David, Valve assemblies for heating devices.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트