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Apparatus for storing and moving a cassette 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65G-049/07
출원번호 US-0201737 (1998-12-01)
발명자 / 주소
  • Perlov Ilya
  • Gantvarg Evgueni
  • Belitsky Victor
출원인 / 주소
  • Applied Materials, Inc.
대리인 / 주소
    Dugan & Dugan LLP
인용정보 피인용 횟수 : 74  인용 특허 : 18

초록 ▼

A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a

대표청구항 ▼

[ What is claimed is:] [1.]1. A fabrication system, comprising:a first processing station to perform a first fabrication step on a substrate, the first processing station including a first docking station, a first frame, a first plurality of cassette storage shelves fixedly mounted on the first fram

이 특허에 인용된 특허 (18)

  1. Prentakis Antonios E. (Cambridge MA), Apparatus and method for loading and unloading wafers.
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  2. Kawano Hitoshi (Ise JPX) Okuno Atsushi (Ise JPX) Tsuda Masanori (Ise JPX) Hayashi Mitsuhiro (Ise JPX) Yamashita Teppei (Ise JPX) Murata Masanao (Ise JPX) Tanaka Tsuyoshi (Ise JPX) Morita Teruya (Ise , Article storage house in a clean room.
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  3. Muka Richard S., Automated wafer buffer for use with wafer processing equipment.
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  4. Matsumoto Hajime (Itami JPX), Automatic carrier system and automatic carrier method.
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  5. Marohl Dan, Compact apparatus and method for storing and loading semiconductor wafer carriers.
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  6. Murata Masanao (Ise JPX) Yamashita Teppei (Ise JPX) Tanaka Tsuyoshi (Ise JPX) Morita Teruya (Ise JPX) Oyobe Hiroyuki (Ise JPX), Conveying system.
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  7. Bachrach Robert Z., Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers.
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  8. Garric George (Perthes FRX) Lafond Andr (Nemours FRX), Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transpo.
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  9. Ohsawa Tetsu (Sagamihara JPX), Heat treating apparatus.
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  10. Fosnight William J., Integrated intrabay buffer, delivery, and stocker system.
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  11. Iizuka Yukio (Inuyama JPX), Load storing equipment.
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  12. Maydan Dan (Los Altos Hills CA) Somekh Sasson (Redwood City CA) Wang David N. (Cupertino CA) Cheng David (San Jose CA) Toshima Masato (San Jose CA) Harari Isaac (Mountain View CA) Hoppe Peter D. (Sun, Multi-chamber integrated process system.
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  13. Iwasaki Junji,JPX ; Katsube Junichi,JPX ; Itami Yasushi,JPX, Semiconductor wafer cassette transportation apparatus and stocker used therein.
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  14. Kakizaki Satoshi (Tokyo JPX) Karino Toshikazu (Tokyo JPX) Izumi Shoichiro (Tokyo JPX) Koizumi Mikio (Tokyo JPX) Ozawa Makoto (Tokyo JPX) Ikeda Fumihide (Tokyo JPX) Yoshida Tohru (Tokyo JPX) Saito Ryo, Semiconductor wafer reaction furnace with wafer transfer means.
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  15. Asakawa Teruo (Yamanashi JPX), Stock unit for storing carriers.
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  16. Iwai Hiroyuki (Sagamihara JPX) Tanifuji Tamotsu (Yamato JPX) Asano Takanobu (Yokohama JPX) Okura Ryoichi (Kanagawa-ken JPX), Treatment apparatus.
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  17. Kwon Chang-Heon,KRX ; Lee Ki-Ho,KRX ; Ryoo Hae-San,KRX ; Kim Yong-Pyo,KRX, Wafer conveyor system.
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  18. Howells John ; Gorman Andrew P. ; Peltola Randall W., Wafer handling system and method.
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  1. Thomas L. Ritzdorf ; Steve L. Eudy ; Gregory J. Wilson ; Paul R. McHugh, Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology.
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  2. Ritzdorf, Thomas L.; Eudy, Steve L.; Wilson, Gregory J.; McHugh, Paul R., Apparatus and method for processing a microelectronic workpiece using metrology.
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  3. Ritzdorf,Thomas L.; Eudy,Steve L.; Wilson,Gregory J.; McHugh,Paul R., Apparatus and method for processing a microelectronic workpiece using metrology.
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  5. Williams, Jeffrey P.; Michelli, Richard; Pollard, Jasper; Kelly, Simon, Apparatus for dispensing prescriptions.
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  6. John M. Pedersen ; Kyle M. Hanson, Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly.
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  7. Nulman, Jaim; Sidi, Nissim, Apparatus for storing and moving a cassette.
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  8. Nulman, Jaim; Sidi, Nissim, Apparatus for storing and moving a cassette.
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  9. Nulman,Jaim; Sidi,Nissim, Apparatus for storing and moving a cassette.
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  10. Perlov, Ilya; Gantvarg, Evgueni; Belitsky, Victor, Apparatus for storing and moving a cassette.
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  11. Dressler, Thomas, Arrangement for storing and transporting at least one optical component.
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  16. Weaver,William Tyler, Datum plate for use in installations of substrate handling systems.
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  17. Yamashita, Seishi, Device for temporarily loading, storing and unloading a container.
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  18. Bonora, Anthony C.; Rogers, Ted, Discontinuous conveyor system.
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  19. Friedman, Gerald M.; Bufano, Michael L.; Hofmeister, Christopher; Gilchrist, Ulysses; Fosnight, William, Elevator-based tool loading and buffering system.
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  22. Elliott, Martin R.; Rice, Michael R.; Hudgens, Jeffrey C.; Englhardt, Eric A.; Belitsky, Victor, Load port configurations for small lot size substrate carriers.
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  23. Bonora, Anthony C.; Hine, Roger G.; Rogers, Theodore W., Loader and buffer for reduced lot size.
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  24. Mages, Andreas; Scheler, Werner; Blaschitz, Herbert; Schulz, Alfred; Schneider, Heinz, Loading and unloading station for semiconductor processing installations.
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  26. Sackett, James G.; Weldon, David E.; Anderson, H. Alexander, Local store for a wafer processing station.
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  27. Merry,Walter R.; Shang,Quanyuan; White,John M., Method and apparatus for in-situ film stack processing.
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  30. Ritzdorf,Thomas L.; Eudy,Steve L.; Wilson,Gregory J.; McHugh,Paul R.; Weaver,Robert A.; Aegerter,Brian; Dundas,Curt; Peace,Steven L., Methods and apparatus for processing microelectronic workpieces using metrology.
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