초록 ▼

A polishing solution supply system can prevent precipitation of solutes on delivery pipes or interior walls of holding tanks so that a polishing solution of a constant solution concentration can be supplied to a polishing tool. The polishing solution supply system includes a stock solution supply so

A polishing solution supply system can prevent precipitation of solutes on delivery pipes or interior walls of holding tanks so that a polishing solution of a constant solution concentration can be supplied to a polishing tool. The polishing solution supply system includes a stock solution supply source, a dilution solution supply source, and a mixing section for mixing a stock solution and a dilution solution to formulate the polishing solution. The mixing section is sealed hermetically to exclude external atmosphere. Delivery lines deliver the polishing solution to each of plural polishing sections.

대표청구항 ▼

[ What is claimed is:] [1.]1. A polishing system comprising:a polishing section for pressing an object to be polished against a polishing tool;a delivery line to communicate with an external polishing solution supply source for delivering a polishing solution to said polishing section;a flow control

[ What is claimed is:] [1.]1. A polishing system comprising:a polishing section for pressing an object to be polished against a polishing tool;a delivery line to communicate with an external polishing solution supply source for delivering a polishing solution to said polishing section;a flow control device for controlling flow of the polishing solution within said delivery line at a desired flow rate within a range of flow rates in response to a command signal; anda shutoff valve for stopping the flow of the polishing solution within said delivery line,wherein said delivery line comprises a circulation line in which the polishing solution can always flow, and a delivery pipe extending directly from said circulation line toward said polishing section.