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Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01B-009/02
출원번호 US-0469892 (1999-12-22)
발명자 / 주소
  • Sun Decai
  • Kubby Joel A.
  • Tran Alex T.
  • Peeters Eric
출원인 / 주소
  • Xerox Corporation
인용정보 피인용 횟수 : 80  인용 특허 : 5

초록

A microelectromechanically tunable Fabry-Perot spectrophotometer is provided for color sensing. Optical fiber provides light input to a Fabry-Perot filter which is adjusted by a switched capacitor circuit. Spectral intensity is sensed by an integrated photodetector.

대표청구항 ▼

[ What is claimed is:] [1.]1. A microelectromechanically tunable Fabry-Perot spectrophotometer structure comprising:a substrate having a first surface;a photodetector positioned on said first surface of said substrate;a first transparent electrode placed over said photodetector and said first surfac

이 특허에 인용된 특허 (5)

  1. Blomberg Martti (Vantaa FIX) Orpana Markku (Espoo FIX) Lehto Ari (Helsinki FIX), Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical materi.
    상세보기
  2. Mallinson Stephen R. (Ipswich GB2), Fabry-perot interferometer.
    상세보기
  3. Zavracky Paul M., Method of monolithically fabricating a microspectrometer with integrated detector.
    상세보기
  4. Jourdain Anne,FRX ; Bieth Claude,FRX, Tunable Fabry-Perot interferometer with floating electrode on one mirror and control electrode pair on opposing mirror.
    상세보기
  5. Katagiri Masayuki (Nara JPX) Watanabe Masanori (Nara JPX) Uda Kazutaka (Tenri JPX) Hijikigawa Masaya (Yamatokoriyama JPX) Tsuchimoto Shuhei (Nara JPX) Inami Yasuhiko (Nara JPX), Variable interferometric device and a process for the production of the same.
    상세보기

이 특허를 인용한 특허 (80)

  1. Martini, Joerg; Kiesel, Peter; Huck, Malte; Bern, Marshall W.; Johnson, Noble M.; Bassler, Michael; Beck, Markus, Analyzers with time variation based on color-coded spatial modulation.
    상세보기
  2. Ionov, Stanislav I.; Hayes, Robert R., Apparatus and method of pulsed frequency modulation for analog optical communication.
    상세보기
  3. Kiesel, Peter; Schmidt, Oliver, Apparatus, methods, devices, and systems in which differences and/or changes in photosensed positions and/or quantities relate to shifts and/or differences in photon energies.
    상세보기
  4. Mestha, Lalit K.; Gulvin, Peter M.; Lin, Pinyen; Wang, Yao Rong, Array based sensor to measure single separation or mixed color (or IOI) patches on the photoreceptor using MEMS based hyperspectral imaging technology.
    상세보기
  5. Cole, Barrett E.; Marta, Terry, Beam intensity detection in a cavity ring down sensor.
    상세보기
  6. Cole, Barrett E., CRDS mirror for normal incidence fiber optic coupling.
    상세보기
  7. Cole, Barrett E., Cavity enhanced photo acoustic gas sensor.
    상세보기
  8. Cole, Barrett E., Cavity ring-down spectrometer having mirror isolation.
    상세보기
  9. Mestha, Lalit K.; Love, Tonya L.; Robbins, Daniel A.; Diehl, Dennis M., Color sensor to measure single separation, mixed color or IOI patches.
    상세보기
  10. Kiesel, Peter; Martini, Joerg, Compact analyzer with spatial modulation and multiple intensity modulated excitation sources.
    상세보기
  11. Cox, James Allen; Cole, Barrett E., Compact gas sensor using high reflectance terahertz mirror and related system and method.
    상세보기
  12. Martini, Joerg; Roe, Jeffrey; Kiesel, Peter; Bassler, Michael; Bell, Alan; Bruce, Richard H.; Johnson, Noble M., Controlling transfer of objects affecting optical characteristics.
    상세보기
  13. Martini, Joerg; Roe, Jeffrey; Kiesel, Peter; Bassler, Michael; Bell, Alan; Bruce, Richard H.; Johnson, Noble M., Controlling transfer of objects affecting optical characteristics.
    상세보기
  14. Protopopov, Vladimir V., Dark-field phase contrast imaging.
    상세보기
  15. Wang, Yao Rong; Fan, Zhigang; Mestha, Lalit Keshav, Determining a total number of people in an IR image obtained via an IR imaging system.
    상세보기
  16. Kiesel, Peter; Schmidt, Oliver; Bassler, Michael, Encoding optical cavity output light.
    상세보기
  17. Fritz, Bernard, Enhanced cavity for a photoacoustic gas sensor.
    상세보기
  18. Payne, Alexander, Fabry-Perot interferometer including membrane supported reflector.
    상세보기
  19. Lin, Pinyen; Gulvin, Peter M.; Wang, Yao Rong; Mestha, Lalit K, Fabry-Perot tunable filter using a bonded pair of transparent substrates.
    상세보기
  20. Lin,Pinyen; Mestha,Lalit K; Gulvin,Peter M; Wang,Yao Rong, Fabry-perot tunable filter systems and methods.
    상세보기
  21. Mestha,Lalit Keshav; Wang,Yao Rong; Kubby,Joel A., Full width array mechanically tunable spectrophotometer.
    상세보기
  22. Cox, James Allen; Higashi, Robert, High reflectance terahertz mirror and related method.
    상세보기
  23. Jin, Yong Wan; Kim, Kyu Sik; Park, Kyung Bae; Lee, Kwang Hee; Leem, Dong-Seok; Chung, Deukseok, Image sensor and electronic device including the same.
    상세보기
  24. Jin, Yong Wan; Kim, Kyu Sik; Park, Kyung Bae; Lee, Kwang Hee; Leem, Dong-Seok; Chung, Deukseok, Image sensor and electronic device including the same.
    상세보기
  25. Jin, Yong Wan; Kim, Kyu Sik; Park, Kyung Bae; Lee, Kwang Hee; Leem, Dong-Seok; Chung, Deukseok, Image sensor and electronic device including the same.
    상세보기
  26. Kiesel, Peter; Schmidt, Oliver; Bassler, Michael; Bruce, Richard H.; Johnson, Noble M., Implanting optical cavity structures.
    상세보기
  27. Kiesel, Peter; Schmidt, Oliver; Bassler, Michael; Bruce, Richard H.; Johnson, Noble M., Implanting optical cavity structures.
    상세보기
  28. Zribi,Anis; Shih,Min Yi; Song,Guiju; Achuthan,Ajit; Claydon,Glenn Scott; Kennerly,Stacey Joy; Kishore,Kuna Venkat Satya Rama; Zheng,Jianming; Harding,Kevin George; Xia,Hua, Interferometer-based real time early fouling detection system and method.
    상세보기
  29. Mestha, Lalit K.; Gulvin, Peter M.; Lin, Pinyen; Wang, Yao Rong, MEMS Fabry-Perot inline color scanner for printing applications using stationary membranes.
    상세보기
  30. Bassler, Michael; Kiesel, Peter; Schmidt, Oliver, Method and system for evaluation of signals received from spatially modulated excitation and emission to accurately determine particle positions and distances.
    상세보기
  31. Bassler, Michael; Kiesel, Peter; Schmidt, Oliver; Johnson, Noble M., Method and system implementing spatially modulated excitation or emission for particle characterization with enhanced sensitivity.
    상세보기
  32. Bassler, Michael; Kiesel, Peter; Schmidt, Oliver; Johnson, Noble M., Method and system implementing spatially modulated excitation or emission for particle characterization with enhanced sensitivity.
    상세보기
  33. Mestha, Lalit Keshav; Xu, Beilei; Paul, Peter, Method for classifying a pixel of a hyperspectral image in a remote sensing application.
    상세보기
  34. Gulvin, Peter M.; Mestha, Lalit K.; Wang, Yao Rong; Lin, Pinyen, Method of projecting image with tunable individually-addressable fabry-perot filters.
    상세보기
  35. Blomberg, Martti, Micromechanical tunable Fabry-Perot interferometer, an intermediate product, and a method for producing the same.
    상세보기
  36. Kiesel, Peter; Schmidt, Oliver, Monitoring light pulses.
    상세보기
  37. Cole,Barrett E.; Higashi,Robert E.; Zins,Christopher J.; Krishnankutty,Subash, Multi-substrate package assembly.
    상세보기
  38. Wang, Yao Rong; Mestha, Lalit Keshav; Gulvin, Peter Michael; Lin, Pinyen, Multiple tile calibration method for color sensors.
    상세보기
  39. Cole, Barrett E.; Marta, Terry; Cox, James Allen; Nusseibeh, Fouad, Multiple wavelength cavity ring down gas sensor.
    상세보기
  40. Cole,Barrett E., Multiple wavelength spectrometer.
    상세보기
  41. Kiesel,Peter; Schmidt,Oliver, Obtaining analyte information.
    상세보기
  42. Schmidt,Oliver; Kiesel,Peter; Bassler,Michael, Obtaining information from optical cavity output light.
    상세보기
  43. Belleville,Claude, Optical MEMS cavity having a wide scanning range for measuring a sensing interferometer.
    상세보기
  44. Cole, Barrett E.; Cox, James A.; Zook, J. David, Optical cavity system having an orthogonal input.
    상세보기
  45. Schulz, Volkmar; Meijer, Eduard Johannes, Optical detector device.
    상세보기
  46. Kiesel, Peter; Bruce, Richard H.; Bassler, Michael, Particle analyzer with spatial modulation and long lifetime bioprobes.
    상세보기
  47. Cole, Barrett E.; Gu, Yuandong, Particle detection using fluorescence.
    상세보기
  48. Kiesel,Peter; Schmidt,Oliver; Bassler,Michael, Photosensing optical cavity output light.
    상세보기
  49. Kiesel,Peter; Schmidt,Oliver; Wolst,Oliver, Photosensing throughout energy range and in subranges.
    상세보기
  50. Jingkuang Chen ; Joel A. Kubby, Process for constructing a spectrophotometer.
    상세보기
  51. Moy, Jean Pierre; Hugon, Xavier, Process for the collective fabrication of optical filtering components, and wafer of components.
    상세보기
  52. Kiesel, Peter; Schmidt, Oliver; Bassler, Michael; Srinivasan, Uma, Processes for producing tunable optical cavities.
    상세보기
  53. Kowarz,Marek W.; Patton,David L.; Spoonhower,John P., Programmable spectral imaging system.
    상세보기
  54. Gulvin, Peter M.; Mestha, Lalit K.; Wang, Yao Rong; Lin, Pinyen, Projector based on tunable individually-addressable Fabry-Perot filters.
    상세보기
  55. Schmidt,Oliver; Kiesel,Peter; Maeda,Patrick Y., Propagating light to be sensed.
    상세보기
  56. Schmidt,Oliver; Mohta,Setu; Kiesel,Peter, Providing light to channels or portions.
    상세보기
  57. Zywicki, Randall W.; Mann, David C.; Cropper, Andre D., Proximity focus imaging interferometer.
    상세보기
  58. Wang,Yao Rong; Gulvin,Peter M; Mestha,Lalit K; Lin,Pinyen, Reconfigurable MEMS fabry-perot tunable matrix filter systems and methods.
    상세보기
  59. Schmidt, Oliver; Kiesel, Peter; Johnson, Noble M., Sensing photon energies emanating from channels or moving objects.
    상세보기
  60. Schmidt,Oliver; Kiesel,Peter; Johnson,Noble M.; Maeda,Patrick Y., Sensing photon energies of optical signals.
    상세보기
  61. Kiesel,Peter; Lean,Meng H.; Schmidt,Oliver; V��lkel,Armin R.; Johnson,Noble M., Sensing photons from objects in channels.
    상세보기
  62. Cole,Barrett E.; Higashi,Robert E.; Subramanian,Arunkumar; Krishnankutty,Subash, Spectrally tunable detector.
    상세보기
  63. Cole,Barrett E.; Higashi,Robert E.; Subramanian,Arunkumar; Krishnankutty,Subash, Spectrally tunable detector.
    상세보기
  64. Sun,Decai; Kubby,Joel A.; Chen,Jingkuang; Tran,Alex T.; Maeda,Patrick Y., Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer.
    상세보기
  65. Mestha, Lalit K.; Gulvin, Peter M.; Lin, Pinyen; Wang, Yao Rong, System and methods of device independent display using tunable individually-addressable fabry-perot membranes.
    상세보기
  66. Kiesel, Peter; Schmidt, Oliver, Transmitting light with lateral variation.
    상세보기
  67. Kiesel, Peter; Schmidt, Oliver, Transmitting light with photon energy information.
    상세보기
  68. Kiesel, Peter; Beck, Markus; Johnson, Noble M.; Bassler, Michael, Transmitting/reflecting emanating light with time variation.
    상세보기
  69. Kiesel, Peter; Schmidt, Oliver, Transmittting light with lateral variation.
    상세보기
  70. Rodney S. Tucker AU; Wayne V. Sorin, Tunable Fabry-Perot filters and lasers.
    상세보기
  71. Tucker, Rodney S.; Sorin, Wayne V.; Baney, Douglas M., Tunable Fabry-Perot filters and lasers utilizing feedback to reduce frequency noise.
    상세보기
  72. Lu,Liang Ju, Tunable fabry-perot filter.
    상세보기
  73. Cox,James A.; Cole,Barrett E., Tunable laser fluid sensor.
    상세보기
  74. Pautet,Christophe; Hugon,Xavier, Tunable optical filtering component.
    상세보기
  75. Kiesel, Peter; Schmidt, Oliver; Bassler, Michael; Srinivasan, Uma, Tuning optical cavities.
    상세보기
  76. Kiesel, Peter; Schmidt, Oliver; Bassler, Michael; Srinivasan, Uma, Tuning optical cavities.
    상세보기
  77. Mestha,Lalit K.; Kubby,Joel A.; Wang,Yao Rong, Two-dimensional spectral cameras and methods for capturing spectral information using two-dimensional spectral cameras.
    상세보기
  78. Mestha, Lalit Keshav, UV enhanced full width array scanning spectrophotometer.
    상세보기
  79. Kiesel,Peter; Schmidt,Oliver; Wolst,Oliver, Using position-sensitive detectors for wavelength determination.
    상세보기
  80. Martynov, Vladimir V.; Platonov, Yuriy, X-ray phase contrast imaging using a fabry-perot interferometer concept.
    상세보기

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