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Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-029/02
  • G01N-027/416
  • B01D-053/02
출원번호 US-0238852 (1999-01-28)
발명자 / 주소
  • Tom Glenn M.
  • King Mackenzie E.
출원인 / 주소
  • Advanced Technology Materials, Inc.
대리인 / 주소
    McLauchlan, III
인용정보 피인용 횟수 : 41  인용 특허 : 41

초록 ▼

A sensor device for detecting the presence of a gas species in a gas environment susceptible to the presence of same. The sensor device may include a piezoelectric crystal coated with a sensor material having adsorptive affinity for the gas species, with an electric oscillator arranged for applying

대표청구항 ▼

[ What is claimed is:] [1.]1. A sensor assembly for detecting the presence of a gas species in a gaseous environment susceptible to the presence of the gas species, said sensor assembly comprising:a dynamic housing comprising at least one chamber;a piezoelectric crystal coated with a sensor material

이 특허에 인용된 특허 (41)

  1. DiLeo Anthony J. (Westford MA) Snow James T. (Nashua NH) Cote Daniel A. (Nashua NH), Apparatus for monitoring impurities in a gas stream.
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  2. Snow James T. (Nashua NH), Apparatus for monitoring moisture in a gas stream.
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  3. Ouwerkerk Martin (Eindhoven NLX) Van Der Sluis Paul (Eindhoven NLX), Bistable switching device containing gadolinium hydride.
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  4. Tom Glenn M. (New Milford CT), Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor.
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  5. Lowell ; Jr. James R. (Bend OR) Edlund David J. (Bend OR) Friesen Dwayne T. (Bend OR) Rayfield George W. (Eugene OR), Chemical sensors.
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  6. Barendz Anton W. (Katwijk aan Zee NLX) Nieuwenhuizen Maarten S. (The Hague NLX), Composite substrate, intended for an apparatus for quantitative detection of a component present in a gas or liquid.
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  7. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT) Luxon Bruce A. (Stamford CT), Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements.
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  8. Pyke Stephen C. (Sisters OR), Detection of fluids with metal-insulator-semiconductor sensors.
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  9. Loesch Muriel (Paris FRX) Menil Francis (La Brede FRX) Lucat Claude (Cestas FRX) Dutronc Pascale (Paris FRX) Marteau Veronique (Survilliers FRX), Device for selective detection of gas.
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  10. Hepher Michael J. (Coylton GB6) Hides Jonathan N. (Glasgow GB6), Dust monitors and dust monitoring.
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  11. Neuburger Glen G. (Jackson Township ; Hudson County NJ), Early warning reactive gas detection system.
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  12. Tom Glenn M. (New Milford CT), Endpoint and/or back diffusion gas impurity detector, and method of using the same.
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  13. Baughman Ray H. (Morris Plains NJ) Elsenbaumer Ronald L. (Morristown NJ) Iqbal Zafar (Morristown NJ) Miller Granville G. (Morristown NJ) Eckhardt Helmut (Madison NJ), Environmental indicator device and method.
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  14. Gedeon Andras (Tby SEX), Gas analyzer.
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  15. Furuki Makoto (Kanagawa JPX) Pu Lyong S. (Kanagawa JPX), Gas detector.
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  16. Kindlund Alf R. (Linkping SEX) Lundstrm Kurt I. (Linkping SEX), Gas detector.
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  17. Minten Karl (La Hoya CA) Krug William (Hoffman Estates IL), Gas monitoring device and method.
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  18. Bowers William D. (Newport Beach CA) Chuan Raymond L. (Hanalei HI), High sensitivity real-time NVR monitor.
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  19. Bowers William D. (Newport Beach CA) Chuan Raymond L. (Hanalei HI), High sensitivity real-time NVR monitor.
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  20. Hinterwaldner Rudolf (Munich DEX), Hydrophobic and/or abhesive materials, reactive diluents, and reactive plasticizers.
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  21. Tom Glenn M. (New Milford CT), In-line detector system for real-time determination of impurity concentration in a flowing gas stream.
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  22. Tom Glenn M. (New Milford CT), In-line detector system for real-time determination of impurity concentration in a flowing gas stream.
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  23. Luoma Gregory A. (Victoria CAX) Yee Lannie K. (Saanichton CAX) Turnham Barrie D. (Victoria CAX), Method and apparatus for detecting presence and concentration of vapors in gaseous fluids.
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  24. Sinclair Ian (Loughborough GB2), Method and apparatus for detecting the presence of a contaminant in a gaseous carrier.
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  25. White Richard Manning (Berkeley CA) Hsu Tzu-Hwa (San Jose CA), Method and apparatus for extracting derivatives from surface acoustic waves.
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  26. Osborne Michael W. (Lilburn GA) England William G. (Suwanee GA) Zhang Xiuyi (Shandong CNX), Method and apparatus for monitoring corrosion.
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  27. Vig John R. (Colts Neck NJ), Method of sensing contamination in the atmosphere.
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  28. Wachter Eric A. (Oak Ridge TN) Thundat Thomas G. (Knoxville TN), Microbar sensor.
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  29. Bein Thomas (Albuquerque NM) Brown Kelly D. (Albuquerque NM) Frye Gregory C. (Albuquerque NM) Brinker Charles J. (Albuquerque NM), Molecular sieve sensors for selective detection at the nanogram level.
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  30. Minten Karl (La Hoya CA) Krug William (Hoffman Estates IL), Oxygen monitoring device and method.
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  31. Tom Glenn M. ; Miller Cynthia A., Piezoelectric enviromental fluid monitoring assembly and method.
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  32. Blakemore Colin B. (Wilmington DE), Piezoelectric moisture analyzers.
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  33. Miller Cynthia A. ; Tom Glenn M., Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same.
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  34. Fesler Richard (Boise ID) Nielsen Jim (Boise ID), Portable gas cylinder safety delivery system.
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  35. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom.
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  36. Hardwick, Steven; McManus, James V., Process for sorption of hazardous waste products from exhaust gas streams.
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  37. Larue Rebecca A., Sensor and method for detecting predetermined chemical species in solution.
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  38. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds.
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  39. Nave Stanley E., Thin-film fiber optic hydrogen and temperature sensor system.
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  40. Yoshida Masafumi (Iwaki JA) Murayama Naohiro (Iwaki JA) Obara Hiroshi (Iwaki JA), Vibration measuring and the apparatus therefor.
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  41. Driscoll William A. (Woodbury MN) Heilmann Steven M. (North St. Paul MN) Rasmussen Jerald K. (Stillwater MN), Vibration-damping constrained-layer constructions.
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  5. Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C., Cantilevered probe detector with piezoelectric element.
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  6. Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C., Cantilevered probe detector with piezoelectric element.
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  7. Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C., Cantilevered probe detector with piezoelectric element.
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  16. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; DiMeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  17. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  18. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  19. McManus, James V.; Dietz, James; Lurcott, Steven M., Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  20. Wakamatsu,Shunichi; Shiobara,Tsuyoshi; Kobata,Tsukasa; Onishi,Naoki, Frequency measuring device for a crystal resonator.
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  21. Sparks, Douglas Ray; Najafi, Nader; Newman, Bernard Edward, Getter device.
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  22. Adams,Jesse D.; Rogers,Benjamin S.; Sulchek,Todd A., Liquid cell and passivated probe for atomic force microscopy and chemical sensing.
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  23. Masters, Brett P., Method and apparatus for analyzing bioprocess fluids.
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  24. Masters, Brett P.; Miller, Michael; Gulati, Vishal K.; Lundstrom, Mark; Srivastava, Alok; Wang, Wayne U., Method and apparatus for detecting estradiol and metabolites thereof using an acoustic device.
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  30. Miyake, Jun; Nakamura, Chikashi; Song, Seong-Hun; Chang, Sang-Mok; Arai, Takaaki, Method for detecting low molecular weight compound in solution.
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  34. Sauer Budge, Alexis F.; Masters, Brett P.; Miller, Michael; Lundstrom, Mark, Methods and apparatus for detecting viruses using an acoustic device.
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  35. Aastrup, Teodor; Smith, Jan; Anderson, Henrik, Piezoelectric resonator.
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  36. Watanabe, Shigenori; Mutoh, Takeru; Koyama, Mitsuaki, Piezoelectric resonator and sensing sensor.
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  37. Ali Hassan, Kazi Zulfiqur; Cost, William M.; Mowry, Curtis D.; Siegal, Michael P.; Robinson, Alex; Whiting, Joshua J.; Howell, Stephen W., Portable analytical system for detecting organic chemicals in water.
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  38. Lyons, Christopher F.; Tabery, Cyrus E., Quartz crystal monitor wafer for lithography and etch process monitoring.
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  39. Crawley,Ed; Lundstrom,Mark; Masters,Brett; Srivastava,Alok; Schmidt,Martin; Miller,Michael, Resonant sensor and sensing system.
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  40. Arenas, Jaime E.; Choi, Hyun-Goo; Dickerson, William Matthew; Hembree, Sarah Beth; Madison, Lara Louise; Masters, Brett P.; Miller, Michael F.; Wang, Wayne U., Reusable detection surfaces and methods of using same.
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  41. Adams, Jesse D., Self-sensing array of microcantilevers for chemical detection.
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