초록 ▼

The present invention provides a wafer positioning device having wafer storage capability. The wafer positioning device has a wafer platform with wafer lift pins, a wafer position sensor, and a storage location in close proximity to the wafer platform and the wafer position sensor. The storage locat

The present invention provides a wafer positioning device having wafer storage capability. The wafer positioning device has a wafer platform with wafer lift pins, a wafer position sensor, and a storage location in close proximity to the wafer platform and the wafer position sensor. The storage location may be above the wafer position sensor, in which case the wafer position sensor retracts or rotates so that the wafer lift pins may elevate a positioned wafer past the position sensor to the storage location. Alternatively, the storage location may be between the wafer platform and the wafer positioning device. The storage location is preferably formed by a plurality of rotatable towers or a plurality of retractable lift pins that are operatively coupled to the wafer platform and that have wafer support portions capable of assuming both a wafer storage position and a wafer passage position.

대표청구항 ▼

[ The invention claimed is:] [1.]1. A wafer positioning device comprisinga wafer platform;a set of wafer lift pins operatively coupled to the wafer platform and adapted to lift and shift so as to selectively position a wafer and store a wafer, the set of wafer lift pins further adapted to allow a fi

[ The invention claimed is:] [1.]1. A wafer positioning device comprisinga wafer platform;a set of wafer lift pins operatively coupled to the wafer platform and adapted to lift and shift so as to selectively position a wafer and store a wafer, the set of wafer lift pins further adapted to allow a first wafer to be transferred to or from the wafer platform by transporting the first wafer between the lift pins when a second wafer is stored above the first wafer by the set of wafer lift pins; anda wafer position sensor operatively coupled to the wafer platform.