Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
F04B-037/02
F04B-023/08
B01D-008/00
출원번호
US-0578650
(2000-05-25)
우선권정보
IT0002235 (1998-10-19)
발명자
/ 주소
Moraja Marco,ITX
Viale Luca,ITX
출원인 / 주소
SAES Getters S.p.A., ITX
대리인 / 주소
Akin, Gump, Strauss, Hauer & Feld, L.L.P.
인용정보
피인용 횟수 :
8인용 특허 :
8
초록▼
A temperature-responsive, mobile shielding device (10) is located between a getter pump (GP) and a turbo pump (TMP) being in line to each other, capable of providing a complete shielding to the radiating heat transfer from the getter pump to the turbo pump when the non-evaporable getter material is
A temperature-responsive, mobile shielding device (10) is located between a getter pump (GP) and a turbo pump (TMP) being in line to each other, capable of providing a complete shielding to the radiating heat transfer from the getter pump to the turbo pump when the non-evaporable getter material is heated to be activated, while on the contrary leaving free, without sensible reductions of conductance the transfer during the normal working of the pumps. This is obtained by providing, mounted on a vacuum flange (13) coupling the two pumps, a set of shielding metal members (11, 31) including shape-memory elements, preferably of Ni--Ti alloy, capable of assuming two different configurations in a first of which, at a higher temperature, the shielding members (11, 31) are substantially all co-planar, with their edges slightly overlapping to form a complete shielding, while in a second configuration, at a lower temperature, the shielding members leave substantially free the passage between the two pumps.
대표청구항▼
[ We claim:] [1.]1. A mobile shielding device (10), mounted on a vacuum flange (13) connecting in line a non-evaporable getter pump (GP) and a turbo pump (TMP), characterized by comprising a plurality of shielding metal members (11, 11', . . . ; 31, 31', . . . ) capable of automatically modifying th
[ We claim:] [1.]1. A mobile shielding device (10), mounted on a vacuum flange (13) connecting in line a non-evaporable getter pump (GP) and a turbo pump (TMP), characterized by comprising a plurality of shielding metal members (11, 11', . . . ; 31, 31', . . . ) capable of automatically modifying their shape or orientation according to the temperature of the device itself, between two different configurations, in one first of which the shielding members are substantially co-planar and form a substantially continuous shield between the two pumps, whereas in the second configuration said members (11, 11', . . . ; 31, 31', . . . ) provide the lowest possible hindrance in the cross-section area of passage between the two pumps, ensuring the highest conductance, said shielding members comprising elements of a shape-memory material, of known type, which are responsive to the temperature for passing from a first shape, corresponding to a higher temperature in a range of working temperatures of the shape-memory material, associated with the said first configuration of the shielding members, to a second shape corresponding to a lower temperature in the same range of temperatures, being associated with the second configuration of the shielding members.
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이 특허에 인용된 특허 (8)
Batzer Thomas H. (Livermore CA) Call Wayne R. (Tracy CA), Continuously pumping and reactivating gas pump.
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