초록 ▼

There are disclosed a process for cleaning ammonia-containing exhaust gas which comprises bringing the exhaust gas into contact with an ammonia decomposition catalyst (e.g. nickel, ruthenium) under heating to decompose most of the ammonia into nitrogen and hydrogen, subsequently bringing the resulta

There are disclosed a process for cleaning ammonia-containing exhaust gas which comprises bringing the exhaust gas into contact with an ammonia decomposition catalyst (e.g. nickel, ruthenium) under heating to decompose most of the ammonia into nitrogen and hydrogen, subsequently bringing the resultant mixed gas into contact with an ammonia adsorbent (e.g. synthetic zeolite) for adsorbing undecomposed ammonia, and then heating regenerating the adsorbent, while bringing reproduced exhaust gas containing the ammonia desorbed from the adsorbent into contact under heating, with the ammonia decomposition catalyst or another ammonia decomposition catalyst; and an apparatus for carrying out the process. It is made possible by the process and apparatus to efficiently and completely clean ammonia-containing exhaust gas exhausted from a semiconductor manufacturing process and the like without generating useless byproduct and dispensing with secondary treatment.

대표청구항 ▼

[ What is claimed is:] [1.]1. A process for cleaning ammonia-containing exhaust gas comprising the steps of:bringing an exhaust gas containing ammonia into contact with at least one train of an ammonia decomposition catalyst under heating to decompose the ammonia into nitrogen and hydrogen;bringing

[ What is claimed is:] [1.]1. A process for cleaning ammonia-containing exhaust gas comprising the steps of:bringing an exhaust gas containing ammonia into contact with at least one train of an ammonia decomposition catalyst under heating to decompose the ammonia into nitrogen and hydrogen;bringing a resultant mixed gas from the ammonia decomposition catalyst into contact with at least one train of an ammonia adsorbent to adsorb undecomposed ammonia remaining in the exhaust gas; andbringing at least one of an inert gas and a part of a purged gas generated by cleaning the exhaust gas into contact with the ammonia adsorbent under heating to regenerate the ammonia adsorbent while bringing a reproduced exhaust gas containing ammonia desorbed from the ammonia adsorbent into contact under heating with at least one of said ammonia decomposition catalyst and another ammonia decomposition catalyst under heating so as to clean the reproduced exhaust gas containing the ammonia desorbed from the ammonia adsorbent.