[특허]Tiltable electrostatic microactuator and method for using same

[미국특허] Tiltable electrostatic microactuator and method for using same 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H02N-001/00
출원번호	US-0755743 (2001-01-05)
발명자 / 주소	Jerman John H. Grade John D.
출원인 / 주소	Iolon, Inc.
대리인 / 주소	Flehr Hohbach Test Albritton & Herbert LLC
인용정보	피인용 횟수 : 21 인용 특허 : 14

초록 ▼

A tiltable electrostatic microactuator comprising a substantially planar substrate and a rotatable member overlying the substrate for rotation about an axis of rotation extending perpendicular to the planar substrate. A plurality of comb drive assemblies are provided and each has a first comb drive member mounted on the substrate and a second comb drive member coupled to the rotatable member. Each of the first and second comb drive members is provided with comb drive fingers. First and second spaced-apart springs are included in the microactuator and each has a first end portion coupled to the substrate and a second end portion coupled to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate. The second comb drive members are movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated. A controller is electrically coupled to the second comb drive members and the substrate for tilting the rotatable member relative to the substrate about a pivot axis extending parallel to the planar substrate. A method for using the microactuator is provided.

대표청구항 ▼

[ What is claimed is:] [1.]1. A tiltable electrostatic microactuator comprising a substantially planar substrate, a rotatable member overlying the substrate for rotation about an axis of rotation extending perpendicular to the planar substrate, a plurality of comb drive assemblies, each of the comb drive assemblies having a first comb drive member mounted on the substrate and a second comb drive member, means for coupling the rotatable member to the second comb drive members, each of the first and second comb drive members being provided with comb drive fingers, first and second spaced-apart springs, each of the first and second springs having a first end portion coupled to the substrate and a second end portion coupled to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate, the second comb drive members being movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated, and a controller electrically coupled to the second comb drive members and the substrate for electrostatically tilting the rotatable member relative to the substrate about a pivot axis extending parallel to the planar substrate.

이 특허에 인용된 특허 (14) 인용/피인용 타임라인 분석

Rodgers M. Steven ; Burg Michael S. ; Jensen Brian D. ; Miller Samuel L. ; Barnes Stephen M., Compact electrostatic comb actuator.
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Pan Jing-Jong ; Xu Jing-Yu ; Yang Charlene Jia-Ling, Efficient electromechanical optical switches.
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Yasuda Susumu,JPX ; Yagi Takayuki,JPX, Electrostatic actuator, probe using the actuator, scanning probe microscope, processing apparatus, and recording/repro.
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Jerman John H. ; Grade John D. ; Drake Joseph D., Electrostatic microactuator and method for use thereof.
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Buchin Michael P., High-speed optical switch.
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Tang William C. (Emeryville CA) Howe Roger T. (Lafayette CA), Laterally driven resonant microstructures.
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Wada Yasuo,JPX ; Mitsuya Munehisa,JPX ; Ichiguchi Tsuneo,JPX ; Hashizume Tomihiro,JPX ; Heike Seiji,JPX ; Lutwyche Mark,JPX ; Watanabe Satoshi,JPX, Micro-fabricated device with integrated electrostatic actuator.
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Suzuki Kenichiro (Tokyo JPX), Micromotion mechanical structure and a process for the production thereof.
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Jerman John H. ; Grade John D. ; Drake Joseph D. ; Petersen Kurt E., Optical data storage system having optical microswitch.
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Watanabe Yasuyuki (Osaka) Iwao Koichiro (Osaka) Nikaido Akira (Saitama) Wada Yoshio (Saitama JPX), Optical switch.
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Fan Long-Sheng ; Hirano Toshiki, Rotary electrostatic microactuator with optimum flexure arrangement.
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Lee Neville K. S. (Sherborn MA) Howard James W. (Natick MA) Godfrey Ben (Marlboro MA), Rotary head actuator for optical disk.
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Wilde Jeffrey P. ; Hurst Jerry E. ; Heanue John F., System and method using optical fibers in a data storage and retrieval system.
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Field Leslie A. (Portola Valley CA) Ruby Richard C. (Menlo Park CA), Thermally actuated optical fiber switch.
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Appleby,Michael; Fraser,Iain; Atkinson,James E., Devices, methods, and systems involving castings.
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Garverick, Steven L.; Nagy, Michael L., High frequency pulse width modulation driver, particularly useful for electrostatically actuated MEMS array.
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Garverick, Steven L.; Nagy, Michael L., High voltage drive circuitry aligned with MEMS array.
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Appleby, Michael P.; Fraser, Iain; Atkinson, James E., Methods for manufacturing three-dimensional devices and devices created thereby.
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Appleby, Michael P.; Fraser, Iain; Atkinson, James E., Methods for manufacturing three-dimensional devices and devices created thereby.
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Lee, Seung Bok; MacDonald, Noel, Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same.
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Zhou, Guangya; Vj, Logeeswaran; Chau, Fook Siong, Optical scanning using vibratory diffraction gratings.
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Zhou, Tiansheng, Rotational type of MEMS electrostatic actuator.
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Chong, John; Lee, Seung Bok; MacDonald, Noel; Lewis, Robert; Hunt, Peter, Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same.
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Appleby, Michael P.; Randolph, William T.; Klinger, Jill E., Systems for large area micro mechanical systems.
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Appleby, Michael P.; Fraser, Iain; Paulus, John, Systems, devices, and/or methods for manufacturing castings.
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Appleby, Michael; Fraser, Iain; Paulus, John, Systems, devices, and/or methods for manufacturing castings.
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Appleby, Michael; Paulus, John; Fraser, Iain; Klinger, Jill; Heneveld, Benjamin, Systems, devices, and/or methods for producing holes.
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Krylov, Slava; Shmilovich, Tsvi, Tilting actuator with close-gap electrodes.
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Chen, Chihchung; Lee, Chengkuo, Variable optical attenuator.
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A	생활필수품
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A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
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[미국특허] Tiltable electrostatic microactuator and method for using same 원문보기

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이 특허에 인용된 특허 (14) 인용/피인용 타임라인 분석

이 특허를 인용한 특허 (21) 인용/피인용 타임라인 분석

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[미국특허] Tiltable electrostatic microactuator and method for using same 원문보기

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이 특허에 인용된 특허 (14) 인용/피인용 타임라인 분석

이 특허를 인용한 특허 (21) 인용/피인용 타임라인 분석

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