초록 ▼

A method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a mold having a relief structure formed therein such

A method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a mold having a relief structure formed therein such that the polymerizable fluid composition fills the relief structure in the mold. The polymerizable fluid composition is subjected to conditions to polymerize polymerizable fluid composition and form a solidified polymeric material therefrom on the transfer layer. The mold is then separated from the solid polymeric material such that a replica of the relief structure in the mold is formed in the solidified polymeric material; and the transfer layer and the solidified polymeric material are subjected to an environment to selectively etch the transfer layer relative to the solidified polymeric material such that a relief image is formed in the transfer layer.

대표청구항 ▼

1. A method of forming a relief image in a structure said method comprising:covering the substrate with a polymeric transfer layer to provide a continuous, planar surface thereon; covering the polymeric transfer layer with a polymerizable fluid composition; contacting the polymerizable fluid composi

1. A method of forming a relief image in a structure said method comprising:covering the substrate with a polymeric transfer layer to provide a continuous, planar surface thereon; covering the polymeric transfer layer with a polymerizable fluid composition; contacting the polymerizable fluid composition with a mold having a relief structure formed therein such that the polymerizable fluid composition substantially fills the relief structure in the mold; subjecting the polymerizable fluid composition to conditions to polymerize polymerizable fluid composition and form a solidified polymeric material therefrom on the transfer layer; separating the mold from the solid polymeric material such that a replica of the relief structure in the mold is formed in the solidified polymeric material; and subjecting the transfer layer and the solidified polymeric material to an etching environment to etch solidified polymeric material and to selectively etch the transfer layer relative to the solidified polymeric material to form a relief image in the transfer layer providing patterned access to the substrate.