초록 ▼

A valve arrangement is provided that more effectively purges processing liquid from a processing liquid delivery system. With the valve arrangement only a small portion of the processing liquid path having a small wetting perimeter must be purged to affect replacement of a dysfunctional injection va

A valve arrangement is provided that more effectively purges processing liquid from a processing liquid delivery system. With the valve arrangement only a small portion of the processing liquid path having a small wetting perimeter must be purged to affect replacement of a dysfunctional injection valve or any other component within the processing liquid delivery system. The valve arrangement comprises a first and a second isolation valve, a pump valve and purge valve configured to reduce the wetting perimeter defined by the four valves. The valve arrangement allows a dysfunctional injection valve or any other component to be replaced without health risk to humans or damage risk to a processing liquid delivery system employing the valve arrangement. During component replacement, the first and the second isolation valves are closed and the pump and the purge valves are opened so as to purge processing liquid from the isolated volume defined by the four valves. Pump/purge cycles preferably are performed, and the purging process may be performed automatically or manually. Once the isolated volume is purged, one of the isolation valves and the component are removed and replaced as a unit.

대표청구항 ▼

1. A valve arrangement adapted to purge a processing liquid path comprising:a processing liquid path adapted to transport processing liquid between a source of the processing liquid and a liquid flow meter; a first isolation valve located adjacent an upstream side of the flow meter and forming a fir

1. A valve arrangement adapted to purge a processing liquid path comprising:a processing liquid path adapted to transport processing liquid between a source of the processing liquid and a liquid flow meter; a first isolation valve located adjacent an upstream side of the flow meter and forming a first part of the processing liquid path; a second isolation valve located upstream from the first isolation valve and forming a second part of the processing liquid path; a purge valve operatively coupled to the processing liquid path between the first and the second isolation valves and adapted to operatively couple to a source of purging gas; and a pump valve operatively coupled to the processing liquid path between the first and the second isolation valves and adapted to operatively couple to a pump; wherein the first isolation valve is operatively coupled between the purge valve and the liquid flow meter.