초록 ▼

A system and corresponding method for bulge testing films (e.g. thin films, coatings, layers, etc.) is provided, as well as membrane structures for use in bulge testing and improved methods of manufacturing same so that resulting membrane structures have substantially identical known geometric and r

A system and corresponding method for bulge testing films (e.g. thin films, coatings, layers, etc.) is provided, as well as membrane structures for use in bulge testing and improved methods of manufacturing same so that resulting membrane structures have substantially identical known geometric and responsive characteristics. Arrayed membrane structures, and corresponding methods, are provided in certain embodiments which enable bulge testing of a film(s) over a relatively large surface area via a plurality of different freestanding membrane portions. Improved measurements of film bulging or deflection are obtained by measuring deflection of a center point of a film, relative to non-deflected peripheral points on the film being tested. Furthermore, membrane structures are adhered to mounting structure in an improved manner, and opaque coatings may be applied over top of film(s) to be bulge tested so that a corresponding optical transducer can more easily detect film deflection/bulging. In certain embodiments, a laser triangulation transducer is utilized to measure film deflection/bulging.

대표청구항 ▼

1. A membrane structure for use in bulge testing of thin films, the membrane structure comprising:a first member having defined therein an array of freestanding thin film membrane portions, each of said thin film membrane portions being positioned over a corresponding cavity so that when a cavity is

1. A membrane structure for use in bulge testing of thin films, the membrane structure comprising:a first member having defined therein an array of freestanding thin film membrane portions, each of said thin film membrane portions being positioned over a corresponding cavity so that when a cavity is pressurized, the corresponding thin film membrane is caused to bulge or deflect so that its deflection can be measured; a second member coupled to said first member, said second member including an inlet for enabling pressurized fluid to be input thereinto at a controlled pressure, said pressurized fluid for pressurizing said cavities so as to cause said thin film membrane portions to deflect outwardly and permit measurement of said deflection as a function of said controlled pressure of said fluid.