초록 ▼

The exposure apparatus of the present invention for forming a specified image on a substrate mounted on a substrate stage, has a linear motor as a part of a driving source for driving said substrate stage. The linear motor comprises: a magnet track; and a motor coil operating in cooperation with sai

The exposure apparatus of the present invention for forming a specified image on a substrate mounted on a substrate stage, has a linear motor as a part of a driving source for driving said substrate stage. The linear motor comprises: a magnet track; and a motor coil operating in cooperation with said magnet track and having a plurality of coil units, each of said coil units having an electrical conductor configured into a geometric polygonal shape defining a substantially planar conducting band surrounding a void, and wherein said plurality of coil units are arranged linearly.

대표청구항 ▼

1. A stage device having a base, a mounting base which is movable relative to said base, and a driving device for driving said mounting base, whereinsaid driving device employs an electric motor as a part of a driving source, and said electric motor comprises: at least one magnet; and a motor coil o

1. A stage device having a base, a mounting base which is movable relative to said base, and a driving device for driving said mounting base, whereinsaid driving device employs an electric motor as a part of a driving source, and said electric motor comprises: at least one magnet; and a motor coil operating in cooperation with said at least one magnet and having at least one coil unit comprising an electrical conductor, said electrical conductor comprising a first sheet and a second sheet of laminar material, each of said sheets including a plurality of substantially coplanar electrically conductive members bonded to a substantially planar electrically insulating substrate, at least one of said conductive members of said first sheet being joined to at least one of said conductive members of said second sheet.