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Micro-electromechanical system device 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01H-057/00
출원번호 US-0495786 (2000-02-01)
발명자 / 주소
  • Jenn-Hwa Huang
  • Samuel L. Coffman
  • Xi-Qing Sun
  • Ji-Hai Xu
  • John Michael Parsey, Jr.
출원인 / 주소
  • Motorola, Inc.
인용정보 피인용 횟수 : 178  인용 특허 : 15

초록 ▼

A Micro-Electromechanical Systems (MEMS) device (100) having conductively filled vias (141). A MEMS component (124) is formed on a substrate (110). The substrate has conductively filled vias (140) extending therethrough. The MEMS component (124) is electrically coupled to the conductively filled via

대표청구항 ▼

1. A Micro-Electromechanical System (MEMS) device, comprising:a substrate having first and second major surfaces; a plurality of conductively filled vias located within a portion of the substrate; a first conductive layer over the first major surface of the substrate, a first portion of the first co

이 특허에 인용된 특허 (15)

  1. Goodwin-Johansson Scott Halden, Arc resistant high voltage micromachined electrostatic switch.
    상세보기
  2. Goldberg Howard D. (Somerville MA) Schmidt Martin A. (Reading MA), Backside contact of sensor microstructures.
    상세보기
  3. Martin Jacob H. (Wellesley MA), Covers for micromechanical sensors and other semiconductor devices.
    상세보기
  4. Loo Robert Y. ; Schmitz Adele ; Brown Julia ; Lynch Jonathan ; Choudhury Debabani ; Foschaar James ; Hyman Daniel J. ; Warneke Brett ; Lam Juan ; Hsu Tsung-Yuan ; Lee Jae ; Mehregany Mehran, Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications.
    상세보기
  5. Kasano Fumihiro (Sakai JPX) Nishimura Hiromi (Takatsuki JPX) Sakai Jun (Osaka JPX) Aizawa Koichi (Ikoma JPX) Kakite Keiji (Hirakata JPX) Awai Takayoshi (Kadoma JPX), Electrostatic relay.
    상세보기
  6. Feng Milton ; Shen Shyh-Chiang, Low actuation voltage microelectromechanical device and method of manufacture.
    상세보기
  7. Buck Daniel C. (Hanover MD), Low inductance cantilever switch.
    상세보기
  8. Ohara Fumio (Okazaki JPX) Yoshihara Shinji (Nagoya JPX) Kanamori Katuhiko (Nukata-gun JPX) Kurahashi Takashi (Okazaki JPX), Method for manufacturing a semiconductor acceleration sensor device.
    상세보기
  9. Zavracky Paul M. (Norwood MA) Morrison ; Jr. Richard H. (Taunton MA), Micromechanical electric shunt and encoding devices made therefrom.
    상세보기
  10. Zavracky Paul M. (Norwood MA), Micromechanical switch with insulated switch contact.
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  11. Zavracky Paul M. ; McGruer Nicol E., Micromechanical switching devices.
    상세보기
  12. Buck Daniel C. (Hanover MD), Non-contact two position microeletronic cantilever switch.
    상세보기
  13. Asada Norihiro,JPX ; Esashi Masayoshi,JPX, Planar type electromagnetic relay and method of manufacturing thereof.
    상세보기
  14. Randall John Neal,BEX ; Kao Ming-Yih, Recessed etch RF micro-electro-mechanical switch.
    상세보기
  15. Jones Gary W. (Raleigh NC) Sune Ching-Tzong (Raleigh NC), Vertical microelectronic field emission devices.
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