초록 ▼

Disclosed is an optical modulating device capable of use as a light-valve, display, optical filter or Fabry-Perot cavity, for example. The device lends itself to batch processing, and is compatible with monolithic integration with silicon, silicon-germanium, silicon-on-sapphire (SOS) or silicon-on-q

Disclosed is an optical modulating device capable of use as a light-valve, display, optical filter or Fabry-Perot cavity, for example. The device lends itself to batch processing, and is compatible with monolithic integration with silicon, silicon-germanium, silicon-on-sapphire (SOS) or silicon-on-quartz (SOQ) advanced microelectronic technology (NMOS, PMOS and CMOS) for integrated control circuitry, electrical addressing, system interfacing, and the like. The device forgoes the complexities of liquid crystal constructions, and avoids the need to position and fix piezoelectric spacers within layers of the device. The invention includes first and second transparent layers that are disposed to oppose one another. Metallic layers are disposed upon the inwardly facing surfaces of the transparent layers and these are arranged to oppose each other. Spectral coupling layers are disposed upon the outwardly facing surfaces of the transparent layers opposite of the metallic layers. Electrodes are disposed upon the inwardly facing surface of the first and second transparent layers. An optical cavity is created between the metallic layers, and voltage is applied to the opposing electrodes to adjust the air gap between the metallic layers. Adjustment of this air gap permits light passing through the device to be controlled. To facilitate movement of one transparent layer with respect to another, one or more flexible portions are incorporated into at least one of the layers.

대표청구항 ▼

1. A light valve comprising:first and second transparent layers, said layers disposed to oppose one another and thereby have inwardly facing surfaces and outwardly facing surfaces; first and second metallic layers, one such metallic layer disposed upon a portion of said inwardly facing surface of sa

1. A light valve comprising:first and second transparent layers, said layers disposed to oppose one another and thereby have inwardly facing surfaces and outwardly facing surfaces; first and second metallic layers, one such metallic layer disposed upon a portion of said inwardly facing surface of said first transparent layer and the other said metallic layer disposed upon a portion of said inwardly facing surface of said second transparent layer wherein said metallic layers are disposed to oppose each other; and first and second spectral coupling layers, one such spectral coupling layer disposed upon said outwardly facing surface of said first transparent layer opposite of said first metallic layer and the other said spectral coupling layer disposed upon said outwardly facing surface of said second transparent layer opposite of said second metallic layer; wherein said metallic layers are spaced-apart to create an air gap therebetween, said metallic layers and said air gap creating an optical cavity through which light is selectively transmitted, and wherein said air gap is adjustable upon an application of heat to said layers so that light passed through said optical cavity is controlled.