초록 ▼

A multi-axis magnetically actuated device, an array of multi-axis magnetically actuated devices, and a method of fabrication of a multi-axis magnetically actuated device are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and a

A multi-axis magnetically actuated device, an array of multi-axis magnetically actuated devices, and a method of fabrication of a multi-axis magnetically actuated device are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and an array of ports adapted to receive an optical waveguide such as, for example, an optical fiber. The multi-axis magnetically actuated device of the invention is capable of rotational movement in two orthogonal directions. In one embodiment, the multi-axis magnetically actuated device comprises two nested rotational members, an inner rotational member nested within an outer rotational member that in turn is nested within a base member. The inner rotational member is mounted by two inner torsional flexures to the outer rotational member that in turn is mounted by two outer torsional flexures to the base member. The inner torsional flexures define an inner axis of rotation while the outer torsional flexures define an outer axis of rotation. The rotational motions of each rotational member arise in response to an interaction between a magnetic influence and a magnetic moment generated by a current passing through coils arranged adjacent to a surface of the inner rotational member. Bulk micromachining techniques enable the members to be formed from a monolithic silicon wafer and can produce a member with a smooth surface. The smooth surface of a member may function as a reflector. In one embodiment, the inner rotational member functions as a reflector.

대표청구항 ▼

1. A multi-axis magnetically actuated device comprising,a base member, a first rotational member mounted to the base member and for rotational movement about a first axis, a second rotational member having first and second opposing surfaces and being mounted to the first rotational member and for ro

1. A multi-axis magnetically actuated device comprising,a base member, a first rotational member mounted to the base member and for rotational movement about a first axis, a second rotational member having first and second opposing surfaces and being mounted to the first rotational member and for rotational movement about a second axis, a first coil pair arranged adjacent to the first surface of the second rotational member and adapted to produce a rotational movement of the first and second rotational members about the first axis in response to interaction with a first magnetic influence, and a second coil pair arranged adjacent to the first surface of the second rotational member and adapted to produce a rotational movement of the second rotational member about the second axis in response to interaction with a second magnetic influence.