초록 ▼

An active temperature control system for a DUT utilizes a heat sink containing HFE7100 liquid and an electric heater. The liquid is cooled below the set point and the heater is used to bring the DUT up to the set point. Set points in the range of -10 degrees C. to +110 degrees C. can be achieved. Th

An active temperature control system for a DUT utilizes a heat sink containing HFE7100 liquid and an electric heater. The liquid is cooled below the set point and the heater is used to bring the DUT up to the set point. Set points in the range of -10 degrees C. to +110 degrees C. can be achieved. The heat sink utilizes only a single coolant for all of the set points, allowing set points to be changed within a few minutes. At a given set point, the heater provides a quick response to offset the effect of self-heating and keep the set point deviation to within a few degrees C. Power following techniques can be utilized to achieve the quick response.

대표청구항 ▼

1. An apparatus for controlling a temperature of a semiconductor device, the apparatus comprising:a heater, adapted to be thermally coupled to the semiconductor device; a heat sink thermally coupled to the heater, wherein the heat sink defines a chamber and the chamber is adapted to have a liquid fl

1. An apparatus for controlling a temperature of a semiconductor device, the apparatus comprising:a heater, adapted to be thermally coupled to the semiconductor device; a heat sink thermally coupled to the heater, wherein the heat sink defines a chamber and the chamber is adapted to have a liquid flowing through the chamber; and a temperature control system, coupled to both the heater and the heat sink, for controlling a temperature of a point on either the heater or the semiconductor device; wherein the temperature control system is adapted to move the temperature of the point on the heater or the device from approximately a first set point temperature to approximately a second set point temperature by changing the control of the heater and maintaining at a substantially constant temperature the liquid flowing into the chamber, the liquid having an operative temperature range that extends as low as approximately -40 degrees C., and the operative set point temperatures extending as low as approximately -10 degrees C.