$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

[미국특허] Photolithographically-patterned variable capacitor structures and method of making 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01G-005/01
출원번호 US-0573363 (2000-05-17)
발명자 / 주소
  • Christopher L. Chua
  • Eric Peeters
  • Koenraad F. Van Schuylenbergh
  • Donald L. Smith
출원인 / 주소
  • Xerox Corporation
대리인 / 주소
    Jeannette M. Walder
인용정보 피인용 횟수 : 43  인용 특허 : 7

초록

A new type of high-Q variable capacitor includes a substrate, a first electrically conductive layer fixed to the substrate, a dielectric layer fixed to a portion of the electrically conductive layer, and a second electrically conductive layer having an anchor portion and a free portion. The anchor p

대표청구항

1. A capacitor, comprising: a substrate; a first electrically conductive layer fixed to the substrate; a release layer fixed to a portion of the electrically conductive layer; and a second electrically conductive layer comprising an anchor portion and a free portion, the anchor portion being fixe

이 특허에 인용된 특허 (7) 인용/피인용 타임라인 분석

  1. Myers Alan M. (Hillsboro OR) Charvat Peter K. (Portland OR) Letson Thomas A. (Beaverton OR) Yang Shi-ning (Portland OR) Bai Peng (Aloha OR), Anchored via connection.
  2. Dupraz Jean-Pierre (Lyons FRX) Gris Jean-Paul (Lyons FRX) Trenchat Daniel (Tignieu Jameyzieu FRX), Capacitor having high stability with temperature.
  3. Warren Keith O. (Newbury Park CA), Electrode structure and method for anodically-bonded capacitive sensors.
  4. Smith Donald Leonard ; Alimonda Andrew Sebastian, Method for forming a spring contact.
  5. Smith Donald L. (Palo Alto CA) Alimonda Andrew S. (Los Altos CA), Photolithographically patterned spring contact.
  6. Smith Donald Leonard ; Alimonda Andrew Sebastian, Photolithographically patterned spring contact.
  7. Cowen Allen Bruce ; Dhuler Vijayakumar Rudrappa ; Hill Edward Arthur ; Koester David Alan ; Mahadevan Ramaswamy, Variable capacitor and associated fabrication method.

이 특허를 인용한 특허 (43) 인용/피인용 타임라인 분석

  1. Takai, Daisuke; Soeta, Kaoru, Connection unit between substrated and component and method for fabricating connection unit.
  2. Mok, Sammy; Chong, Fu Chiung, Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies.
  3. Appleby,Michael; Fraser,Iain; Atkinson,James E., Devices, methods, and systems involving castings.
  4. Appleby,Michael; Fraser,Iain; Atkinson,James E., Devices, methods, and systems involving castings.
  5. Musolf, Jurgen; Kohl, Paul, Electrostatic actuators with intrinsic stress gradient.
  6. Haemer,Joseph Michael; Chong,Fu Chiung; Modlin,Douglas N., Enhanced compliant probe card systems having improved planarity.
  7. Bottoms, Wilmer R.; Chong, Fu Chiung; Mok, Sammy; Modlin, Douglas, High density interconnect system for IC packages and interconnect assemblies.
  8. Chong, Fu Chiung; Kao, Andrew; McKay, Douglas; Litza, Anna; Modlin, Douglas; Mok, Sammy; Parekh, Nitin; Swiatowiec, Frank John; Shan, Zhaohui, High density interconnect system having rapid fabrication cycle.
  9. Chong, Fu Chiung; Kao, Andrew; McKay, Douglas; Litza, Anna; Modlin, Douglas; Mok, Sammy; Parekh, Nitin; Swiatowiec, Frank John; Shan, Zhaohui, High density interconnect system having rapid fabrication cycle.
  10. Chong,Fu Chiung; Kao,Andrew; McKay,Douglas; Litza,Anna; Modlin,Douglas; Mok,Sammy; Parekh,Nitin; Swiatowiec,Frank John; Shan,Zhaohui, High density interconnect system having rapid fabrication cycle.
  11. Depetro, Riccardo; Manzini, Stefano, High-Q, variable capacitance capacitor.
  12. Van Schuylenbergh, Koenraad; Chow, Eugene M.; Lu, JengPing, Integrateable capacitors and microcoils and methods of making thereof.
  13. Chow, Eugene M., Interposer with microspring contacts.
  14. Reid, Jr.,James R., Low cost digital variable capacitor.
  15. Fork, David K.; Mei, Ping; Van Schuylenbergh, Koenraad F., Low cost integrated out-of-plane micro-device structures and method of making.
  16. Cohn, Michael Bennett; Xu, Ji-Hai, MEMS device with integral packaging.
  17. Stokes, Robert B., MEMS variable inductor and capacitor.
  18. Chong, Fu Chiung; Mok, Sammy, Massively parallel interface for electronic circuit.
  19. Chong,Fu Chiung; Mok,Sammy, Massively parallel interface for electronic circuit.
  20. Fork, David K.; Mei, Ping; Van Schuylenbergh, Koenraad F., Method of forming an out-of-plane structure.
  21. Musolf, Jurgen; Kohl, Paul, Method of making an electrostatic actuator.
  22. Fork, David K.; Chua, Christopher L., Method of making low cost integrated out-of-plane micro-device structures.
  23. Chua,Christopher L.; Lemmi,Francesco; Van Schuylenbergh,Koenraad F.; Lu,Jeng Ping; Fork,David K.; Peeters,Eric; Sun,Decai; Smith,Donald L.; Romano,Linda T., Method of making photolithographically-patterned out-of-plane coil structures.
  24. Chow, Eugene M., Method of producing an interposer with microspring contacts.
  25. Appleby, Michael P.; Fraser, Iain; Atkinson, James E., Methods for manufacturing three-dimensional devices and devices created thereby.
  26. Appleby, Michael P.; Fraser, Iain; Atkinson, James E., Methods for manufacturing three-dimensional devices and devices created thereby.
  27. Appleby, Michael P.; Fraser, Iain; Atkinson, James E., Methods for manufacturing three-dimensional devices and devices created thereby.
  28. Appleby,Michael P.; Fraser,Iain; Atkinson,James E., Methods for manufacturing three-dimensional devices and devices created thereby.
  29. Scott Halden Goodwin-Johansson, Microelectromechanical elevating structures.
  30. Mei, Ping; Sun, Decai; Street, Robert A., Microelectromechanical system based sensors, sensor arrays, sensing systems, sensing methods and methods of fabrication.
  31. Chow, Eugene M.; Shrader, Eric J.; Paschkewitz, John S., Microspring structures adapted for target device cooling.
  32. Chow, Eugene M.; Peeters, Eric, Microsprings partially embedded in a laminate structure and methods for producing same.
  33. Chua, Christopher L.; Peeters, Eric; Van Schuylenbergh, Koenraad F.; Smith, Donald L., Photolithographically-patterned variable capacitor structures and method of making.
  34. Chua, Christopher L.; Peeters, Eric; Van Schuylenbergh, Koenraad F.; Smith, Donald L., Photolithographically-patterned variable capacitor structures and method of making.
  35. Hantschel, Thomas; Fork, David K.; De Bruyker, Dirk; Shih, Chinnwen; Lu, Jeng Ping; Chua, Christopher L.; Apte, Raj B.; Krusor, Brent S., Release height adjustment of stressy metal devices by annealing before and after release.
  36. Ikehashi,Tamio, Semiconductor device using piezoelectric actuator formed by use of MEMS technique.
  37. Appleby, Michael P.; Randolph, William T.; Klinger, Jill E., Systems for large area micro mechanical systems.
  38. Mok, Sammy; Chong, Fu Chiung; Milter, Roman, Systems for testing and packaging integrated circuits.
  39. Appleby, Michael P.; Fraser, Iain; Paulus, John, Systems, devices, and/or methods for manufacturing castings.
  40. Appleby, Michael; Fraser, Iain; Paulus, John, Systems, devices, and/or methods for manufacturing castings.
  41. Appleby, Michael; Paulus, John; Fraser, Iain; Klinger, Jill; Heneveld, Benjamin, Systems, devices, and/or methods for producing holes.
  42. Chan, Edward; Wen, Bing, Thermomechanical device for measuring electromagnetic radiation.
  43. Hantschel, Thomas; Chow, Eugene M., Vertically spaced plural microsprings.

활용도 분석정보

상세보기
다운로드
내보내기

활용도 Top5 특허

해당 특허가 속한 카테고리에서 활용도가 높은 상위 5개 콘텐츠를 보여줍니다.
더보기 버튼을 클릭하시면 더 많은 관련자료를 살펴볼 수 있습니다.

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로