초록 ▼

A vapor generator (19, 62) and connected chemical vapor deposition chamber (28) for providing a vapor for operations such as chemical vapor deposition has an atomizer (16, 16A, 38, 50) for forming an aerosol or droplet spray (36, 58, 74, 80) separate from a vaporization chamber (19, 62). The aerosol

A vapor generator (19, 62) and connected chemical vapor deposition chamber (28) for providing a vapor for operations such as chemical vapor deposition has an atomizer (16, 16A, 38, 50) for forming an aerosol or droplet spray (36, 58, 74, 80) separate from a vaporization chamber (19, 62). The aerosol is passed into a heated vaporization chamber (19, 62) wherein the particles or droplets are flash vaporized and larger droplets are vaporized by direct contact with heated surfaces. The resulting gas/vapor stream is then used for chemical vapor deposition, in a separate chemical vapor deposition chamber (26). The vapor and gas stream is preferably passed through a restricted passageway (22, 44, 68) for mixing before being introduced into the chemical vapor deposition chamber (26).

대표청구항 ▼

1. A device to produce a source of a gas stream carrying a vapor of a selected reagent therein comprising an aerosol generator for generating an aerosol in a gas stream, the aerosol generator having a nozzle, a compressed gas source connected to discharge through the nozzle to form the gas stream, a

1. A device to produce a source of a gas stream carrying a vapor of a selected reagent therein comprising an aerosol generator for generating an aerosol in a gas stream, the aerosol generator having a nozzle, a compressed gas source connected to discharge through the nozzle to form the gas stream, a passageway open to the nozzle for a liquid containing the reagent to flow into the passageway to form small droplets containing the selected reagent, a separate vaporization chamber having heated surfaces over which the gas stream passes, the heated surfaces being heated to a temperature to cause vaporization of the droplets carried in the gas stream whereby the gas stream exits the vaporization chamber carrying vapor formed from the droplets, the aerosol generator and the vaporization chamber being mounted in a single housing such that droplets are sprayed directly from the aerosol generator into the vaporization chamber, and an insulated wall between the vaporization chamber and the aerosol generator for reducing heat transfer to the aerosol generator, a separate chemical vapor deposition (CVD) chamber for receiving the gas stream from the vaporization chamber, the separate CVD chamber being connected to the vaporization chamber through a conduit of substantially smaller cross sectional area than the vaporization chamber; and a heated porous gas filter between the vaporization chamber and the separate CVD chamber.