초록 ▼

A system for dividing a single flow of gas into two or more secondary flows of known, precise values, without requiring a high upstream pressure. The system includes an inlet for receiving the single gas flow, and first and second flow lines connected to the inlet. A mass flow meter measures gas flo

A system for dividing a single flow of gas into two or more secondary flows of known, precise values, without requiring a high upstream pressure. The system includes an inlet for receiving the single gas flow, and first and second flow lines connected to the inlet. A mass flow meter measures gas flow through the first line and provides a signal indicative of the measured flow rate. A restrictor restricts gas flow through the first line to a desired flow rate, and has a smallest cross-sectional flow area selected to provide an upstream pressure high enough to allow the mass flow meter to operate properly and lower than a predetermined upper pressure limit. A mass flow controller receives the signal indicative of the measured flow rate from the mass flow meter and maintains a flow rate through the second line based on the signal.

대표청구항 ▼

1. A system for dividing a single flow of gas into two or more secondary flows of known, precise values without requiring a high upstream pressure, comprising:an inlet for receiving the single flow of gas; a first flow line connected to the inlet; a second flow line connected to the inlet; a mass fl

1. A system for dividing a single flow of gas into two or more secondary flows of known, precise values without requiring a high upstream pressure, comprising:an inlet for receiving the single flow of gas; a first flow line connected to the inlet; a second flow line connected to the inlet; a mass flow meter measuring gas flow through the first line and providing a signal indicative of the measured flow rate; a restrictor restricting gas flow through the first line to a desired flow rate, the restrictor having a smallest cross-sectional flow area selected to provide an upstream pressure high enough to allow the mass flow meter to operate properly and lower than a predetermined upper pressure limit; and a mass flow controller controlling gas flow through the second line, the mass flow controller receiving the signal indicative of the measured flow rate from the mass flow meter and maintaining a flow rate through the second line based on the signal.