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A valve particularly for use within a chemical-mechanical polishing (CMP) system for controlling the supply of slurry and de-ionized water streams while allowing for the constant recirculation of those streams. The valve includes a body having a bore with first and second inlet and outlet port openi

A valve particularly for use within a chemical-mechanical polishing (CMP) system for controlling the supply of slurry and de-ionized water streams while allowing for the constant recirculation of those streams. The valve includes a body having a bore with first and second inlet and outlet port openings for the slurry and water streams, and a third outlet port opening selectably couplable with the first and second inlet ports. A spool or other valve element is slidably received within the bore for axial movement therein, and is positionable within the bore in a null orientation closing the third outlet port to the first and second inlet ports. The spool is movable from the null orientation to a first operating orientation opening the third outlet port path to the first inlet port, and to a second operating orientation opening the third outlet port to the second inlet port.

대표청구항 ▼

1. A method of controlling the flow of a slurry stream from a slurry reservoir and a water stream from a water reservoir in a chemical-mechanical polishing (CMP) system having a supply line for delivering the slurry and water streams to a polishing pad, said method comprising the steps of:(a) provid

1. A method of controlling the flow of a slurry stream from a slurry reservoir and a water stream from a water reservoir in a chemical-mechanical polishing (CMP) system having a supply line for delivering the slurry and water streams to a polishing pad, said method comprising the steps of:(a) providing a valve comprising: a body including: a bore extending axially along a longitudinal axis; a first inlet port opening radially into said bore and coupled in fluid communication with the slurry stream, and a second inlet port opening radially into said bore, said second inlet port being spaced-apart axially from said first inlet port along said longitudinal axis and being coupled in fluid communication with the water stream; a first outlet port coupled in fluid communication with the slurry reservoir and opening radially into said bore, said first outlet port being couplable in fluid communication with said first inlet port along a first fluid flow path through said body, and a second outlet port coupled in fluid communication with the water reservoir and opening radially into said bore, said second outlet port being spaced-apart axially from said first outlet port along said longitudinal axis and being couplable in fluid communication with said second inlet port along a second fluid flow path through said body separated from said first fluid flow path; and a third outlet port coupled in fluid communication with said supply line and opening radially into said bore axially intermediate said first and said second outlet port along said longitudinal axis, said third fluid port being selectably couplable in fluid communication with said first inlet port along a third fluid flow path through said body and, alternately, said second inlet port along a fourth fluid flow path through said body; and a valve element slidably received within said bore for axial movement along said longitudinal axis in a forward direction and in an opposite rearward axial direction; (b) positioning said valve element within said bore in a null orientation closing said third and said fourth fluid flow path; (c) shifting said valve element from said null orientation in said forward direction to a first operating orientation opening said third fluid flow path to said slurry stream and closing said fourth fluid flow path to said water stream; and (d) alternately shifting said valve element in said rearward direction to a second operating orientation opening said fourth fluid flow path to said water stream and closing said third fluid flow path to said slurry stream.