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[미국특허] Membrane probing system with local contact scrub 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01R-031/02
  • G01R-031/26
출원번호 US-0686353 (2000-10-10)
발명자 / 주소
  • K. Reed Gleason
  • Kenneth R. Smith
  • Mike Bayne
출원인 / 주소
  • Cascade Microtech, Inc.
대리인 / 주소
    Chernoff, Vilhauer McClung & Stenzel, LLP
인용정보 피인용 횟수 : 25  인용 특허 : 55

초록 ▼

A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rewarward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Flexible traces form data/signal li

대표청구항 ▼

1. A probing assembly for probing an electrical device comprising:(a) a rigid support: (b) a membrane assembly having a region overlying said support; (c) a plurality of elongate non-upright contacts supported by said region, each of said contacts having a length and a contacting portion spaced apar

이 특허에 인용된 특허 (55) 인용/피인용 타임라인 분석

  1. Buchoff Leonard S. (Bloomfield NJ) Kosiarski Joseph P. (Englishtown NJ) Dalamangas Chris A. (Fort Lee NJ), Conductive elastomeric contacts and connectors.
    상세보기
  2. Boegh-Petersen Allan (Flongvaenget 14 Hedehusene DK-2640 DKX), Connector assembly for a circuit board testing machine, a circuit board testing machine, and a method of testing a circu.
    상세보기
  3. Byrnes Herbert P. (Poughkeepsie NY) Wahl Richard (Fishkill NY), Contact for an electrical contactor assembly.
    상세보기
  4. Eroglu Adnan,CHX ; Knopfel Hans Peter,CHX ; Senior Peter,GB3, Device and method for injecting fuels into compressed gaseous media.
    상세보기
  5. Kempf Stefan,DEX ; Reising Michael,DEX, Device for gripping and holding substrates.
    상세보기
  6. Higgins H. Dan (323 E. Redfield Rd. Chandler AZ 85225) Normington Peter (516 Country Plz. South Gilbert AZ 85234), Die carrier apparatus.
    상세보기
  7. Gross Hal D. (San Diego CA) Hudon Gerard M. (St. Paul MN), Elastic membrane probe.
    상세보기
  8. Zifcak Mark S. (Putnam CT) Kosa Bruce G. (Woodstock CT), Electrical circuit board interconnect.
    상세보기
  9. Swart Mark A. (Upland CA), Expandable diaphragm test modules and connectors.
    상세보기
  10. McBride Donald G. (Binghamton NY) Ellis Theron L. (Vestal NY), Flexible carrier for an electronic device.
    상세보기
  11. Parks Howard L. (Woodland Hills CA) Kuronen John M. (Camarillo CA), Flexible connector cable.
    상세보기
  12. Crumly William R. (Anaheim CA), Flexible electrical cable connector with double sided dots.
    상세보기
  13. MacKay Colin A. (Austin TX), Flexible electrical interconnect and method of making.
    상세보기
  14. Huff Richard E. (Belmont CA) Leslie Brian (Cupertino CA), Force delivery system for improved precision membrane probe.
    상세보기
  15. Shihadeh Elias E.,ILX ; Weiler Peter M., General purpose assembly programmable multi-chip package substrate.
    상세보기
  16. Chapin Fletcher W. (Vestal NY) Dranchak David W. (Endwell NY) Engle David E. (Vestal NY) Hall Richard R. (Endwell NY) Macek Thomas G. (Endicott NY), High density connector.
    상세보기
  17. Albrecht Thomas R. (San Jose CA) Mamin Harry J. (Palo Alto CA) Rugar Daniel (Palo Alto CA), High density data storage system with topographic contact sensor.
    상세보기
  18. Ardezzone Frank J. (Santa Clara CA), High density probe-head with isolated and shielded transmission lines.
    상세보기
  19. Bove Ronald (Wappingers Falls NY) Hubacher Eric M. (Wappingers Falls NY), High density wafer contacting and test system.
    상세보기
  20. Hechtman Charles D. (Plainsboro NJ), High frequency in-circuit test fixture.
    상세보기
  21. Grangroth Robert H. (Osseo MN) Loy Jerald M. (Anoka MN), Integrated circuit interface.
    상세보기
  22. Crumly William R. (Anaheim CA), Membrane connector with stretch induced micro scrub.
    상세보기
  23. Huff Richard E. (Belmont CA), Membrane probe contact bump compliancy system.
    상세보기
  24. Huff Richard E. (1408 Solana Dr. Belmont CA 94002) Perlaki Miklos (1406 Sage Rd. Colfax CA 95713), Membrane probe with automatic contact scrub action.
    상세보기
  25. Liu Ken K. F. (Saratoga CA) Min Byoung-Youl (Cupertino CA) Moti Robert J. (San Jose CA) Husain Syed A. (Milpitas CA), Membrane probing of circuits.
    상세보기
  26. Gleason K. Reed ; Smith Kenneth R. ; Bayne Mike, Membrane probing system with local contact scrub.
    상세보기
  27. Elder Richard A. (Dallas TX) Wilson Arthur M. (Dallas TX) Bagen Susan V. (Dallas TX) Miller Juanita G. (Richardson TX), Method for fabrication of probe card for testing of semiconductor devices.
    상세보기
  28. Kister January, Method for making a probe preserving a uniform stress distribution under deflection.
    상세보기
  29. Leedy Glenn (1061 E. Mountain Dr. Santa Barbara CA 93108), Method for making an interconnection structure for integrated circuits.
    상세보기
  30. Trobough Douglas W. (Beaverton OR), Method of forming a conductive contact bump on a flexible substrate and a flexible substrate.
    상세보기
  31. Ubbens Henricus D. U. (Eindhoven NLX) Langeveld Peer (Eindhoven NLX), Method of interconnecting conductors of different layers of a multilayer printed circuit board.
    상세보기
  32. Woith Blake F. (Orange CA) Pasiecznik ; Jr. John (Malibu CA) Crumly William R. (Anaheim CA) Betz Robert K. (Long Beach CA), Method of making a cast elastomer/membrane test probe assembly.
    상세보기
  33. Leedy Glenn J. (1061 E. Mountain Dr. Santa Barbara CA 93108), Method of making a flexible tester surface for testing integrated circuits.
    상세보기
  34. Chance Randal W. (Boise ID), Method of manufacturing edge connected semiconductor die.
    상세보기
  35. Roberts Joseph A. (Grafton NH), Method of manufacturing printed circuits.
    상세보기
  36. Eldridge Benjamin N. ; Grube Gary W. ; Khandros Igor Y. ; Mathieu Gaetan L., Method of planarizing tips of probe elements of a probe card assembly.
    상세보기
  37. Budnaitis John J. ; Leong Jimmy, Method of wafer level burn-in.
    상세보기
  38. Palagonia Anthony Michael ; Pikna Paul Joseph ; Maddix John Thomas, Micro probe assembly and method of fabrication.
    상세보기
  39. Akram Salman ; Hembree David R. ; Wood Alan G., Micromachined probe card having compliant contact members for testing semiconductor wafers.
    상세보기
  40. Swapp Mavin (Mesa AZ), Micromachined semiconductor probe card.
    상세보기
  41. Smolley Robert (Porteughese Bend CA), Multi-element circuit construction.
    상세보기
  42. Yasunaga Soichiro (Kawasaki JPX), Multiple function type D/A converter.
    상세보기
  43. Pasiecznik ; Jr. John (Malibu CA), Multiport membrane probe for full-wafer testing.
    상세보기
  44. Yamaguchi Masao (Tokyo JPX), Probe apparatus.
    상세보기
  45. Evans Arthur (Brookfield Center CT) Baker Joseph R. (New Milford CT) Lander Jack (Danbury CT), Probe assembly for testing integrated circuit devices.
    상세보기
  46. Higgins H. Dan (323 E. Redfield Chandler AZ 85225), Probe card apparatus.
    상세보기
  47. Okubo Kazumasa (Kanagawa JPX) Okubo Masao (Nishinomiya JPX) Yoshimitsu Yasuro (Takatsuki JPX) Sugaya Kiyoshi (Amagasaki JPX), Probe card in which contact pressure and relative position of each probe end are correctly maintained.
    상세보기
  48. Chong Fu Chiung, Programmable high-density electronic device testing.
    상세보기
  49. Huff Richard E. (Belmont CA) Matta Farid (Mountain View CA), Self-leveling membrane probe.
    상세보기
  50. Hirano Toshiki,JPX ; Kimura Atsuo,JPX ; Mori Shinichiro,JPX, Semi-conductor chip test probe and process for manufacturing the probe.
    상세보기
  51. Afshari Bahram (Menlo Park CA) Matta Farid (Mountain View CA) Hanlon Lawrence (Menlo Park CA), Shearing stress interconnection apparatus and method.
    상세보기
  52. Hemmie Dale L. (Burlington IA) Evans Robert M. (Hightstown NJ), Stacked dual dipole MMDS feed.
    상세보기
  53. Evans Arthur (Brookfield Center CT) Baker Joseph R. (New Milford CT) Rising Robert P. (Trumbull CT), Test probe assembly for testing integrated circuit devices.
    상세보기
  54. Byrnes Herbert P. (Poughkeepsie NY) Halbout Jean-Marc (Larchmont NY) Scheuermann Michael R. (Katonah NY) Shapiro Eugene (Stamford CT), Thin interface pellicle for dense arrays of electrical interconnects.
    상세보기
  55. Barsotti Christina C. (Vancouver WA) Schamel Alfred H. (West Linn OR), Wafer probe with transparent loading member.
    상세보기

이 특허를 인용한 특허 (25) 인용/피인용 타임라인 분석

  1. Narita,Satoshi, Electrical probe assembly with guard members for the probes.
    상세보기
  2. Chey, S. Jay; Fregeau, Dustin M.; Zupanski-Nielsen, Donna S.; Prabhakar, Aparna; Samudrala, Pavan; Shaikh, Mohammed S., High performance compliant wafer test probe.
    상세보기
  3. Chey, S. Jay; Fregeau, Dustin M.; Zupanski-Nielsen, Donna S.; Prabhakar, Aparna; Samudrala, Pavan; Shaikh, Mohammed S., High performance compliant wafer test probe.
    상세보기
  4. Treibergs,Valts; Mroczkowski,Jason, Integrated printed circuit board and test contactor for high speed semiconductor testing.
    상세보기
  5. Lewinnek, David Walter; Sinsheimer, Roger Allen; Valiente, Luis Antonio; DiPalo, Craig Anthony, Interconnect for transmitting signals between a device and a tester.
    상세보기
  6. Kister, January, Knee probe having reduced thickness section for control of scrub motion.
    상세보기
  7. Kister, January, Layered probes with core.
    상세보기
  8. Kister, January, Low profile probe having improved mechanical scrub and reduced contact inductance.
    상세보기
  9. Kister, January, Multiple contact probes.
    상세보기
  10. Kister, January, Multiple contact probes.
    상세보기
  11. Kister, January, Probe bonding method having improved control of bonding material.
    상세보기
  12. Kister, January, Probe cards employing probes having retaining portions for potting in a potting region.
    상세보기
  13. Kister, January; Shtarker, Alex, Probe retention arrangement.
    상세보기
  14. Kister, January; Shtarker, Alex, Probe retention arrangement.
    상세보기
  15. Kister, January, Probe skates for electrical testing of convex pad topologies.
    상세보기
  16. Kister, January, Probes with high current carrying capability and laser machining methods.
    상세보기
  17. Kister, January, Probes with offset arm and suspension structure.
    상세보기
  18. Kister, January, Probes with self-cleaning blunt skates for contacting conductive pads.
    상세보기
  19. Lin, Yen-Liang; Kuo, Tin-Hao; Wu, Sheng-Yu; Chen, Chen-Shien, Semiconductor device having conductive bumps of varying heights.
    상세보기
  20. Kister, January, Space transformers employing wire bonds for interconnections with fine pitch contacts.
    상세보기
  21. Sinsheimer, Roger Allen, Structure for transmitting signals in an application space between a device under test and test electronics.
    상세보기
  22. Suto, Anthony J.; Wrinn, Joseph Francis; Toscano, John P.; Arena, John Joseph, Test fixture.
    상세보기
  23. Kister, January, Vertical guided layered probe.
    상세보기
  24. Kister, January, Vertical probe array arranged to provide space transformation.
    상세보기
  25. Kister, January, Vertical probe array arranged to provide space transformation.
    상세보기

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