초록 ▼

A method for controlling an amount of material delivered during a material transfer. This method includes the steps of inputting a target amount for a material to be delivered from a source location to a target location, updating the target amount during the delivery of the material using a predicti

A method for controlling an amount of material delivered during a material transfer. This method includes the steps of inputting a target amount for a material to be delivered from a source location to a target location, updating the target amount during the delivery of the material using a predictive model-based algorithm, and updating the predictive model-based algorithm based on process performance data using a recursive least-squares procedure. An adaptive selection algorithm which is used to determine whether at least one previous predictive model-based algorithm parameter should be replaced with at least one new predictive model-based algorithm parameter in order to adapt the predictive model-based algorithm in response to a process change. A method for overlapping a delivery of at least one independently measured material with a delivery of a main material during a material transfer process.

대표청구항 ▼

1. A method for controlling an amount of material delivered during a material transfer, comprising the steps of:inputting a target amount for a material to be delivered from a source location to a target location; updating the target amount during the delivery of the material using a predictive mode

1. A method for controlling an amount of material delivered during a material transfer, comprising the steps of:inputting a target amount for a material to be delivered from a source location to a target location; updating the target amount during the delivery of the material using a predictive model-based algorithm; and updating said predictive model-based algorithm based on process performance data using a recursive least-squares procedure, wherein said predictive model-based algorithm updates the target amount to equal a dispensed amount plus a predicted spill amount, wherein said predicted spill amount is defined by the following predictive model: K1*Q+K2*Q2 where, K1 and K2 are parameters of said predictive model which are independent of material flow rate, and Q is a measured or calculated flow rate of the material.